Patent for License:

Calibration Tool    

A method and apparatus for determining a position of an object.

Overview

Generally a method and apparatus for determining a position of an object is provided. In one embodiment, an apparatus includes a locating plate, a window and a camera. The camera is positioned to view the target through the window disposed in the locating plate. The position of an object viewed by the camera through the window by be resolved relative to the position of the locating plate. In other embodiments, the apparatus may be disposed in a processing system such as a chemical mechanical polisher to align components such as robots, load cups and polishing heads.

SUMMARY OF THE TECHNOLOGY
One aspect of the technology generally provides an apparatus for determining a position of an object. In one embodiment, an apparatus for determining a position of an object includes a locating plate, a window and a camera. The camera is positioned to view a target through the window disposed in the locating plate. The object on which the target is disposed may be viewed by the camera enabling the relative position between the locating plate and the object to be determined. In another embodiment, the image produced by the camera is viewed on a display remotely located from the apparatus.
In another aspect of the technology, a system for determining a position of an object is provided. In one embodiment, the system includes a target disposed on the object and a portable tool. The tool includes a locating plate coupled to a housing. A window is disposed in the locating plate or the housing and has an indicia disposed thereon. A camera is disposed between the housing and the locating plate. The camera positioned to view the target through the window.
Another aspect of the technology, a method for determining a position is provided. In one embodiment, the method includes the steps of locating a calibration tool in a predefined position, viewing an object thought a window disposed in the calibration tool, and determining the relative position between an indicia disposed on the window and the object.

Patent Summary

U.S. Patent Classes & Classifications Covered in this Patent:

Class 451: Abrading

The term "abrading" (grinding) may include a polishing device that acts by removal of an integral portion of the material acted upon, but not such as depends upon the application of a coating capable of taking a polish by friction or upon a compression, consolidation, or swaging of the material. Every invention relating to abrading must have to do either with an abrading element; a tool consisting of an abrading element or material and a holder by which it may be put to use; a machine embodying an abrading material or tool and means for moving it or the work, or an action equivalent to that of a tool; a holder for the work; a method or process of abrading; an attachment or accessory to a tool, machine, or process; or a plurality of these features. Note: A cutting device and an abrasive tool distinguished solely by the abrasive material or composition will be found elsewhere.

Subclass 384: Lens holder
Subclass 42: Lens
Subclass 6: By optical sensor

Class 250: Radiant Energy

This class provides for all methods and apparatus for using, generating, controlling or detecting radiant energy, combinations including such methods or apparatus, subcombinations of same and accessories therefore not classifiable elsewhere.

Subclass 206.1: Having means to generate positional information in at least one plane of a target moving relative to one or more photodetectors
Subclass 491.1: MEANS TO ALIGN OR POSITION AN OBJECT RELATIVE TO A SOURCE OR DETECTOR

Class 382: Image Analysis

This is the generic class for apparatus and corresponding methods for the automated analysis of an image or recognition of a pattern. Included herein are systems that transform an image for the purpose of (a) enhancing its visual quality prior to recognition, (b) locating and registering the image relative to a sensor or stored prototype, or reducing the amount of image data by discarding irrelevant data, and (c) measuring significant characteristics of the image.

Subclass 141: Manufacturing or product inspection
Subclass 202: Linear stroke analysis (e.g., limited to straight lines)