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Microwave Annealing    

Preparing polycrystalline semiconductor thin film using microwave annealing.

Overview

Relates to preparing polycrystalline semiconductor thin film using microwave annealing. This technology is highly related to polycrystalline thin film transistor (TFT), which is generally used in the fields of SRAM, LCD, OLED, Solar Cell, SOI device, etc. This technology can be used solely or in combination with other polycrystallization technologies. Short lengths of the representative claims means broad scopes of this patent right, which proves that this patent is almost origin in this technology.

Primary Application of the Technology

Display (LCD, OLED)
Semiconductor (SRAM, SOI)
Solar Cell

Patent Summary

U.S. Patent Classes & Classifications Covered in this listing:

Class 438: Semiconductor Device Manufacturing: Process

This class provides for manufacturing a semiconductor containing a solid-state device for the following purposes: (a) conducting or modifying an electrical current, (b) storing electrical energy for subsequent discharge within a microelectronic integrated circuit, or (c) converting electromagnetic wave energy to electrical energy or electrical energy to electromagnetic energy. Also operations involving: (1) coating a substrate with a semiconductive material, or (2) coating a semiconductive substrate or substrate containing a semiconductive region. It also provides for operations involving etching a semiconductive substrate or etching a substrate containing a semiconductive region. The class provides for packaging or treatment of packaged semiconductor.

Subclass 166: Including recrystallization step
Subclass 486: And subsequent crystallization
Subclass 487: Utilizing wave energy (e.g., laser, electron beam, etc.)

Class 257: Active Solid-State Devices (E.G., Transistors, Solid-State Diodes)

This class provides for active solid-state electronic devices, that is, electronic devices or components that are made up primarily of solid materials, usually semiconductors, which operate by the movement of charge carriers - electrons or holes - which undergo energy level changes within the material and can modify an input voltage to achieve rectification, amplification, or switching action, and are not classified elsewhere.

Subclass E21.133: Epitaxial re-growth of non-monocrystalline semiconductor material, e.g., lateral epitaxy by seeded solidific ation, solid-state crystallization, solid-state graphoepitaxy, explosive crystallization, grain growth in polycrystalline material (EPO)