Patent for Sale:

Semiconductor Wafer Immersion Cleaning    

Technologies comprising complete immersive wafer cleaning systems and compelling new product line opportunity.

Overview

Valuable international patent portfolio offered by a leading semiconductor equipment manufacturing company providing a set of methods and processes designed to enable the cleaning at the sub-micron scale. The inventions include systems for immersive wafer processing, wet cleaning and drying of wafers.

The seller would like to be granted a license back.

The seller may consider selling these patents individually.

Additional Information

The technology designed here is at an advanced stage of development. The buyer of these assets could put itself in position to enter the wafer cleaning business very quickly, with an advanced technology offering.

Patent Summary

U.S. Patent Classes & Classifications Covered in this listing:

Class 134: Cleaning And Liquid Contact With Solids

Cleaning, i.e., the separation or removal of adherent dirt, scale, tarnish, impurities or any other foreign or undesired matter from solid materials or objects whether or not the resultant separated ingredients are recovered in whole or in part for subsequent use. Cleaning may be performed by, or may involve as a part thereof, contacting solids with liquids. The contacting of solids with liquids may be for purposes other than cleaning.

Subclass 1: Including application of electrical radiant or wave energy to work
Subclass 1.2: Semiconductor cleaning
Subclass 1.3: Semiconductor cleaning
Subclass 10: Including regeneration, purification, recovery or separation of agent used
Subclass 11: Gas or vapor form agent condensed or absorbed on work
Subclass 18: Combined (e.g., automatic control)
Subclass 19: Including work heating or contact with combustion products
Subclass 26: Using sequentially applied treating agents
Subclass 28: One an acid or an acid salt
Subclass 30: Including steam, gaseous agent or temperature feature
Subclass 31: Gas or vapor condensation or absorption oowork
Subclass 32: With work or work parts movable during treatment
Subclass 33: Centrifugal force and/or rotated work body
Subclass 34: With treating fluid motion
Subclass 36: Plural, separately fed, and either simultaneously applied or admixed, treating fluids
Subclass 40: Oils, grease, tar, or wax removal, by dissolving
Subclass 41: Metal base work, acid treating
Subclass 42: Miscellaneous
Subclass 61: Sequential work treating receptacles or stations with means to transfer work or fluid-applying devices
Subclass 62: With initial work emptying, inverting, orienting or puncturing means
Subclass 64R: For sheet, web, strand or bar form work, longitudinally traveling
Subclass 66: With work transfer from one movable carrier to another
Subclass 68: With splash, spray or jet applying means
Subclass 94.1: With plural means for supplying or applying different fluids at the same workstation
Subclass 95.2: With drying means
Subclass 105: With heating, cooling or heat exchange means
Subclass 122R: For sheet, web, strand or bar form work, longitudinally traveling
Subclass 135: With means to hold work holder in draining position above treating liquid
Subclass 140: Motor operated apparatus
Subclass 147: With movable work support and separate movable means to cause fluid motion (e.g., pump, splasher, agitator)
Subclass 148: And spray or jet applying conduit or nozzle
Subclass 153: Rotary, pivoted or swinging work holder
Subclass 155: With means to drain from or supply liquid to the tank
Subclass 157: Rotary, revolving, swinging or oscillating motion work holder or carrier
Subclass 184: With movable means to cause fluid motion (e.g., pump, splasher, agitator)
Subclass 186: With means to drain from and/or supply liquid to tank
Subclass 198: With spray or jet supplying and/or applying means

Class 139: Textiles: Weaving

The manufacture of fabrics having one set of threads arranged transversely to another set and interlaced therewith, each thread of one set lying above some and below the remaining threads of the other set. Excudes braiding.

Subclass 198: Exteriorly supported cop

Class 239: Fluid Sprinkling, Spraying, And Diffusing

The general class for claims pertaining to the spraying, sprinkling, or scattering of fluids or fluent solids either in the form of slurries or as dry material, over an extended area on a surface, including - weather control or modification, diffusers, fountains, drinking tubes and straw, dry pulverulent material, terminal fluid handling elements and orifice shapes.

Subclass 560: Three or more dissimilar groups

Class 257: Active Solid-State Devices (E.G., Transistors, Solid-State Diodes)

This class provides for active solid-state electronic devices, that is, electronic devices or components that are made up primarily of solid materials, usually semiconductors, which operate by the movement of charge carriers - electrons or holes - which undergo energy level changes within the material and can modify an input voltage to achieve rectification, amplification, or switching action, and are not classified elsewhere.

Subclass E29.255: With field effect produced by insulated gate (EPO)
Subclass E21.043: Using ion im plantation (EPO)
Subclass E21.219: Chemical etching (EPO)
Subclass E21.228: Wet cleaning only (EPO)
Subclass E21.244: Involving dielectric removal step (EPO)
Subclass E21.251: By chemical means (EPO)
Subclass E21.255: By chemical means (EPO)
Subclass E21.288: Of silicon (EPO)
Subclass E21.309: By liquid etching only (EPO)
Subclass E21.335: In Group IV semiconductor (EPO)
Subclass E21.579: For dual damascene type structures (EPO)

Class 34: Drying And Gas Or Vapor Contact With Solids

(1) the separation of liquids from solids, i.e., drying; (2) the contacting of solids with either, or both, gases or vapors; and (3) feather treatment.

Subclass 245: MATERIAL TREATED BY ELECTROMAGNETIC ENERGY
Subclass 259: Microwave energy
Subclass 267: Having treating gas or vapor circulation
Subclass 310: Application of temporary coating
Subclass 351: Treating agent displaces moisture
Subclass 420: Including radiation or convection treatment
Subclass 442: Form-supported treated article
Subclass 76: With forced circulation
Subclass 78: Recirculation of treating gas or vapor
Subclass 79: Separation of substances from treating or exhaust gases or vapors

Class 216: Etching A Substrate: Processes

Chemical etching processes for treating articles of commerce or intermediate articles not otherwise provided for in which one of the manufacturing steps includes a chemical etching step (use of an etchant) and wherein the material treated is not completely removed.

Subclass 109: Etchant contains fluoride ion
Subclass 99: Substrate contains silicon or silicon compound

Class 156: Adhesive Bonding And Miscellaneous Chemical Manufacture

This is the generic class for: Manufacturing processes and apparatus; manufacture of articles of commerce in which one of the manufacturing steps includes a chemical reaction; manufacture of panels from settable inorganic compositions; manufacture of electrical conductors of indefinite length.

Subclass 345.11: For liquid etchant

Class 438: Semiconductor Device Manufacturing: Process

This class provides for manufacturing a semiconductor containing a solid-state device for the following purposes: (a) conducting or modifying an electrical current, (b) storing electrical energy for subsequent discharge within a microelectronic integrated circuit, or (c) converting electromagnetic wave energy to electrical energy or electrical energy to electromagnetic energy. Also operations involving: (1) coating a substrate with a semiconductive material, or (2) coating a semiconductive substrate or substrate containing a semiconductive region. It also provides for operations involving etching a semiconductive substrate or etching a substrate containing a semiconductive region. The class provides for packaging or treatment of packaged semiconductor.

Subclass 16: Optical characteristic sensed
Subclass 510: INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL
Subclass 637: With formation of opening (i.e., viahole) in insulative layer
Subclass 695: Simultaneous etching and coating
Subclass 700: Formation of groove or trench
Subclass 704: Having liquid and vapor etching steps
Subclass 706: Vapor phase etching (i.e., dry etching)
Subclass 710: By creating electric field (e.g., plasma, glow discharge, etc.)
Subclass 713: Forming tapered profile (e.g., tapered etching, etc.)
Subclass 714: Including change in etch influencing parameter (e.g., energizing power, etchant composition, temperature, etc.)
Subclass 719: Silicon
Subclass 723: Silicon oxide or glass
Subclass 725: Organic material (e.g., resist, etc.)
Subclass 727: Producing energized gas remotely located from substrate
Subclass 734: Sequential etching steps on a single layer
Subclass 743: Silicon oxide or glass
Subclass 745: Liquid phase etching
Subclass 747: With relative movement between substrate and confined pool of etchant
Subclass 756: Silicon oxide
Subclass 795: RADIATION OR ENERGY TREATMENT MODIFYING PROPERTIES OF SEMICONDUCTOR REGION OF SUBSTRATE (E.G., THERMAL, CORPUSCULAR, ELECTROMAGNETIC, ETC.)
Subclass 905: CLEANING OF REACTION CHAMBER
Subclass 906: CLEANING OF WAFER AS INTERIM STEP
Subclass 907: CONTINUOUS PROCESSING
Subclass 908: Utilizing cluster apparatus
Subclass 928: FRONT AND REAR SURFACE PROCESSING

Class 252: Compositions

(A) Compositions of matter, having or not having structure, physical form or heterogeneous arrangement of components and for which there is no provision elsewhere. (B) Packages of such compositions, or other articles which include such compositions for which there is no provision elsewhere. (C) Processes of making, or peculiar to making, such compositions and for which there is no provision elsewhere. (D) Apparatus for use in or peculiar to such processes and for which there is no provision elsewhere.

Subclass 79.1: ETCHING OR BRIGHTENING COMPOSITIONS
Subclass 79.4: With organic material

Class 310: Electrical Generator Or Motor Structure

This is the residual class for all subject matter, not elsewhere classified, relating to electrical generator or motor structure.

Subclass 317: Input circuit for mechanical output from piezoelectric element

Class 331: Oscillators

This is the generic class for electrical oscillators.

Subclass 116R: Electromechanical resonator controlled

Class 414: Material Or Article Handling

Apparatus, device, implement or method for placing or displacing particular articles in a particular manner or with reference to a particular support, for loading or unloading vehicles with materials or objects in general, charging or discharging furnaces, bins, chambers, or other receptacles, stacking or piling articles or materials, also combinations of general types of carriers or forwarding mechanisms, which types, per se, are separately classified elsewhere, and general types of elevators, cranes, or hoists when associated with special means for handling the load to place it on the carrier or remove it therefrom.

Subclass 153: With driven means within chamber to manipulate or transfer material
Subclass 220: With means for changing pressure in trap chamber
Subclass 590: Additional movement is rotational
Subclass 800: PROCESS
Subclass 808: Of charging or discharging, or facilitating charging or discharging of static receptacle
Subclass 815: Including vertically swinging load support

Class 294: Handling: Hand And Hoist-Line Implements

Devices combined with handles, terminal elements, or attachments peculiarly adapted for engaging supporting articles or materials for handling or manipulating purposes.

Subclass 1.1: MISCELLANEOUS

Class 510: Cleaning Compositions For Solid Surfaces, Auxiliary Compositions Therefor, Or Processes Of Preparing The Compositions

This class includes the following subject matter, not provided for elsewhere: Cleaning compositions for solid surfaces which are specialized and designed for, or peculiar to, use in cleaning or removing foreign matter from solid surfaces; Auxiliary compositions per se, for perfecting the cleaning compositions of this class or for perfecting a cleaning process (e.g. rinse- or dryer-added fabric softener compositions, etc.); Compositions of this class defined in terms of specific physical structure (e.g., tablet, coated particle, etc.) - the lines generally prevailing between the composition classes and the article classes are applicable to Class 510 unless otherwise indicated; Packages of compositions of this class, or other articles which releasably enclose or support such compositions, for which there is no provision elsewhere


Class 261: Gas And Liquid Contact Apparatus

Apparatus specially adapted to produce an intimate contact between gases and liquids to exchange properties or mutually modify conditions.

Subclass 102: Gas-flow control
Subclass 105: Gas-flow control

Class 219: Electric Heating

This class includes all those devices commonly known as electric heaters, electric-heating metal working apparatus, electrically-heated tools and instruments. This is the generic class for electric heating devices, per se. Devices and systems equipped with electric heating means in which the electric heating means is combined with or includes specific other art structure whereby the heated material is withdrawn, stored or otherwise utilized will also be classified in the appropriate other art class to which it pertains.

Subclass 612: Seam bonding
Subclass 617: Welding

European Patent Classes & Classifications Covered in this listing:

Class D06P3: TEXTILES; PAPER - TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR

DYEING OR PRINTING TEXTILES; DYEING LEATHER, FURS, OR SOLID MACROMOLECULAR SUBSTANCES IN ANY FORM . Special processes of dyeing or printing textiles, or dyeing leather, furs, or solid macromolecular substances in any form, classified according to the material treated .

Class C10B39: CHEMISTRY; METALLURGY - PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT

DESTRUCTIVE DISTILLATION OF CARBONAGEOUS MATERIALS FOR PRODUCTION OF GAS, COKE, TAR, OR SIMILAR MATERIALS . Cooling or quenching coke.

Class B01J19: PERFORMING OPERATIONS; TRANSPORTING - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS, COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS . Chemical, physical, or physico-chemical processes in general .

Class B08B3: PERFORMING OPERATIONS; TRANSPORTING - CLEANING

CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL . Cleaning by methods involving the use or presence of liquid or steam .

Class H01L21: ELECTRICITY - BASIC ELECTRIC ELEMENTS

SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR . Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof .