Patent for Sale:

Manufacture Techniques for MEMS Structures    

International patent portfolio covers manufacturing methods for various MEMS structures with broad range of applications.

Overview

This patent portfolio, for sale from a leading semiconductor equipment manufacturer provides international coverage with broad, valuable claims covering the following areas:



- Bonding alternating conductive and glass layers with applicability in the formation of stacks for microcolumns in electron optics, including electron microscopes and lithography.


- Creation of micro electromechanical structures (MEMS), and micro opto-electromechanical structures (MOEMS).


- Techniques for removing particles from a surface by heating a fluid to form a vapor; applying the vapor to the surface so as to condense the vapor on the particles and coat the particles on the surface with a liquid; then applying a suction force after applying the vapor to remove the majority of the particles.


- Techniques for etching dielectric layers in semiconductor or MEMS via sequence of processing cycles that include: depositing an inactive polymeric film, activating the film to etch the structure, and the removal of the film.


- Plasma etching a pattern containing at least one deeply recessed feature which is etched to a depth of 5mum or more into a silicon-containing substrate, in a manner which generates smooth sidewalls.


- Techniques for depositing and monitoring layers used to form optical waveguides and method for forming an optical waveguide with undercladding and uppercladding layers deposited with a thermal CVD technique.


- Techniques for processing a film over a substrate in a process chamber; monitoring a parameter during processing of the film over a thickness greater than 3�m; and changing the process conditions in accordance with a correlation among a value of the parameter, an optical property of the film, and the process conditions.

Primary Application of the Technology

Semiconductor, optical waveguides, micro-machines.

The seller would like to be granted a license back.

The seller may consider selling these patents individually.

Patent Summary

U.S. Patent Classes & Classifications Covered in this listing:

Class 700: Data Processing: Generic Control Systems Or Specific Applications

This class is structured into two main divisions: (1)for the combination of a data processing or calculating computer apparatus (or corresponding methods for performing data processing or calculating operations) AND a device or apparatus controlled thereby, the entirety hereinafter referred to as a "control system". (2)for data processing or calculating computer apparatus (or corresponding methods for performing data processing or calculating operations) wherein the data processing or calculating computer apparatus is designed for or utilized in a particular art device, system, process, or environment, or is utilized for the solution of a particular problem in a field other than mathematics (arithmetic processing per se is classified elsewhere).

Subclass 100: Job scheduling
Subclass 121: Integrated circuit production or semiconductor fabrication
Subclass 33: Constraint or limit (e.g., max/min)
Subclass 51: Statistical process control (SPC)
Subclass 79: Having protection or reliability feature
Subclass 89: Having specific algorithm

Class 438: Semiconductor Device Manufacturing: Process

This class provides for manufacturing a semiconductor containing a solid-state device for the following purposes: (a) conducting or modifying an electrical current, (b) storing electrical energy for subsequent discharge within a microelectronic integrated circuit, or (c) converting electromagnetic wave energy to electrical energy or electrical energy to electromagnetic energy. Also operations involving: (1) coating a substrate with a semiconductive material, or (2) coating a semiconductive substrate or substrate containing a semiconductive region. It also provides for operations involving etching a semiconductive substrate or etching a substrate containing a semiconductive region. The class provides for packaging or treatment of packaged semiconductor.

Subclass 14: WITH MEASURING OR TESTING
Subclass 216: Gate insulator structure constructed of diverse dielectrics (e.g., MNOS, etc.) or of nonsilicon compound
Subclass 450: Implanting through recessed oxide
Subclass 477: By vapor phase surface reaction
Subclass 48: MAKING DEVICE OR CIRCUIT RESPONSIVE TO NONELECTRICAL SIGNAL
Subclass 5: INCLUDING CONTROL RESPONSIVE TO SENSED CONDITION
Subclass 52: Having cantilever element
Subclass 706: Vapor phase etching (i.e., dry etching)
Subclass 708: Photo-induced etching
Subclass 709: Photo-induced plasma etching
Subclass 725: Organic material (e.g., resist, etc.)
Subclass 739: Lateral etching of intermediate layer (i.e., undercutting)
Subclass 745: Liquid phase etching
Subclass 752: Germanium
Subclass 753: Silicon
Subclass 756: Silicon oxide
Subclass 792: Utilizing electromagnetic or wave energy (e.g., photo-induced deposition, plasma, etc.)

Class 702: Data Processing:Measuring, Calibrating, Or Testing

This class provides for apparatus and corresponding methods wherein the data processing system or calculating computer is designed for or utilized in an environment relating to a specific or generic measurement system, a calibration or correction system, or a testing system.

Subclass 84: Quality control

Class 216: Etching A Substrate: Processes

Chemical etching processes for treating articles of commerce or intermediate articles not otherwise provided for in which one of the manufacturing steps includes a chemical etching step (use of an etchant) and wherein the material treated is not completely removed.

Subclass 103: Etchant contains acid
Subclass 107: Etchant contains fluoride ion
Subclass 2: ETCHING OF SEMICONDUCTOR MATERIAL TO PRODUCE AN ARTICLE HAVING A NONELECTRICAL FUNCTION
Subclass 39: FORMING GROOVE OR HOLE IN A SUBSTRATE WHICH IS SUBSEQUENTLY FILLED OR COATED
Subclass 46: Masking of sidewall
Subclass 58: GAS PHASE ETCHING OF SUBSTRATE
Subclass 59: With measuring, testing, or inspecting
Subclass 60: By optical means or of an optical property
Subclass 67: Using plasma
Subclass 73: Etching vapor produced by evaporation, boiling, or sublimation
Subclass 74: Etching inorganic substrate
Subclass 79: Etching silicon containing substrate
Subclass 90: Relative movement between the substrate and a confined pool of etchant
Subclass 91: Rotating, repeated dipping, or advancing movement of substrate
Subclass 99: Substrate contains silicon or silicon compound

Class 257: Active Solid-State Devices (E.G., Transistors, Solid-State Diodes)

This class provides for active solid-state electronic devices, that is, electronic devices or components that are made up primarily of solid materials, usually semiconductors, which operate by the movement of charge carriers - electrons or holes - which undergo energy level changes within the material and can modify an input voltage to achieve rectification, amplification, or switching action, and are not classified elsewhere.

Subclass 773: Of specified configuration

Class 134: Cleaning And Liquid Contact With Solids

Cleaning, i.e., the separation or removal of adherent dirt, scale, tarnish, impurities or any other foreign or undesired matter from solid materials or objects whether or not the resultant separated ingredients are recovered in whole or in part for subsequent use. Cleaning may be performed by, or may involve as a part thereof, contacting solids with liquids. The contacting of solids with liquids may be for purposes other than cleaning.

Subclass 3: Including acidic agent
Subclass 31: Gas or vapor condensation or absorption oowork

Class 156: Adhesive Bonding And Miscellaneous Chemical Manufacture

This is the generic class for: Manufacturing processes and apparatus; manufacture of articles of commerce in which one of the manufacturing steps includes a chemical reaction; manufacture of panels from settable inorganic compositions; manufacture of electrical conductors of indefinite length.

Subclass 345.11: For liquid etchant
Subclass 345.21: Liquid etchant spray type

Class 205: Electrolysis: Processes, Compositions Used Therein, And Methods Of Preparing The Compositions

Processes (1) involving the use of electrolysis (2) of preparing or purifying compounds or elements involving chemical reaction brought about by electrical or wave energy in a magnetic field; (3) of treating materials involving chemical reaction brought about by wave energy; (4) of preparing or purifying compounds or elements involving chemical reaction brought about by an electrostatic field or electrical discharge; (5) involving the use of electrophoresis or electro-osmosis; (6) of treating a liquid (a) to separate or purify the liquid using electric and magnetic fields simultaneously, (b) to separate or purify the liquid using an electric field, or (c) using a magnetic field to obtain some effect other than mere separation or purification of the liquid; (7) involving coating, forming, or etching by the use of sputtering; and (8) involving coating by the use of vacuum arc discharge. Electrolyte compositions specialized for use in electrolytic processes or methods of preparing the compositions.

Subclass 81: Involving measuring, analyzing, or testing
Subclass 82: Controlling coating process in response to measured or detected parameter
Subclass 84: Parameter is thickness, weight, or composition of coating

Class 204: Chemistry: Electrical And Wave Energy

This class includes, where not provided for elsewhere: A. Processes (1) involving the use of electrolysis (as provided for in Class 205); (2) of preparing or purifying compounds or elements involving chemical reaction brought about by electrical or wave energy in a magnetic field; (3) of treating materials involving chemical reaction brought about by wave energy; (4) of preparing or purifying compounds or elements involving chemical reaction brought about by an electrostatic field or electrical discharge; (5) involving the use of electrophoresis or electro-osmosis; (6) of treating a liquid (a) to separate or purify the liquid using electric and magnetic fields simultaneously, (b) to separate or purify the liquid using an electric field, or (c) using a magnetic field to obtain some effect other than mere separation or purification of the liquid; (7) involving coating, forming, or etching by the use of sputtering; and (8) involving coating by the use of vacuum arc discharge.

Subclass 228.6: Electrolyte property sensing means (e.g., temperature, concentration, pH, conductivity, etc.)

Class 118: Coating Apparatus

pparatus for applying or obtaining a surface coating on a base and/or apparatus for impregnating base materials and takes all such apparatus not provided for in other classes. The coating obtained may be permanent or transitory. The coating may be supplied solely by extraneous materials, as in a painting or waxing operation, or may be supplied wholly or in part by the base materials as in the formation of an oxide coating on a metal base. The coating may consist of an emulsion, dispersion, solution, admixture or oil which is clearly disclosed as leaving a residual film, layer or continuous deposit on the base.

Subclass 719: Multizone chamber
Subclass 722: With treating means (e.g., jarring)
Subclass 723R: By creating electric field (e.g., gas activation, plasma, etc.)

Class 436: Chemistry: Analytical And Immunological Testing

This is the generic class for: chemical test standards, analytical compositions, and processes which involve a chemical reaction for determining qualitatively or quantitatively the presence of a chemical element, compound or complex in a composition or a chemical compound, or an element or radical in a compound; processes for analysis which involve an in vitro antigen-antibody, immunological or protein binding interaction other than those involving a living antigen, or enzyme label; and processes of analysis or study of the chemical properties of a sample; the physiological effect of a sample; or chemical determination of a physical property of a sample. Compositions and their mere methods of use of thermoparticulating compositions. Combinations of tests or measurements with methods of regulating a chemical reaction not otherwise provided for in a chemical synthesis class or otherwise.

Subclass 150: Of a liquid
Subclass 151: By means of a solid body in contact with a fluid
Subclass 166: Including reagent preparation
Subclass 43: AUTOMATED CHEMICAL ANALYSIS
Subclass 73: METAL OR METAL CONTAINING
Subclass 80: Cu, Ag, Au

Class 422: Chemical Apparatus And Process Disinfecting, Deodorizing, Preserving, Or Sterilizing

This is a generic class for (1) processes of disinfecting, deodorizing, preserving or sterilizing and (2) apparatus for (a) carrying out chemical reactions, (b) preparing or treating chemical compounds or compositions even though only a physical reaction is discernible, (c) performing an analysis which involves either a chemical reaction or a physical reaction not elsewhere provided, for and (d) carrying out the above processes not elsewhere provided for.

Subclass 75: Including titrator
Subclass 77: With integrating or differentiating means
Subclass 79: Biological, chemical, or total oxygen demand (i.e., BOD, COD, TOD)