SEARCH
Tynax ~ Patent Library

Patent for Sale:

Multiple Electron-Beam Writing to Mask and Wafer    

Field-proven technologies for correcting critical dimension errors including uniformity and linearity errors arising from multiple sources with an emphasis on real-time computations during exposure.

Overview

Substantial patent portfolio covering direct-write technologies for rapid writing of masks and wafers using multiple electron-beams.
These inventions assure very tight control of the beam shape, the stage carrying the semiconductor wafer, the raster scan of the beam, dose modulation and pixel deflection, etc.
This I.P. focuses on advances required to meet specifications in real-world manufacturing environments.
Areas addressed include:
- CD Uniformity and Linearity.
- Placement and Overlay Accuracy.
- Multi-beam Throughput Enhancement.
- High Performance Air Bearing Stage (field proven).

Primary Application of the Technology

The primary application is the use of multiple electron beams for direct writing of semiconductor wafers.

The seller would like to be granted a license back.

The seller may consider selling these patents individually.

Additional Information

An audio interview with one of the inventors is available on request, and so is a voice narrated slideshow presentation.
Other materials are available, and the seller has expertise on-hand to explain the technology and answer questions.

Patent Summary

U.S. Patent Classes & Classifications Covered in this listing:

Class 315: Electric Lamp And Discharge Devices: Systems

Electric lamp and electric space discharge device systems: structural combinations with circuit elements; structural combinations with heating and/or cooling means; cathode-ray tubes; lamps and/or discharge devices as sole load devices; lamps; electric space discharge devices gas or vapor discharge devices; high vacuum-type discharge devices, and gas or vapor-type discharge devices claimed broadly; plural load device systems; art uses and combinations with art devices; testing electric lamps and discharge devices; and operating a lamp or a gas or vapor discharge device.

Subclass 1: CATHODE RAY TUBE CIRCUITS
Subclass 366: For flat cathode-ray tube
Subclass 94: WITH CATHODE OR CATHODE HEATER SUPPLY CIRCUIT
Subclass 111.81: Electron or ion source
Subclass 291: CURRENT AND/OR VOLTAGE REGULATION
Subclass 342: Diverse types

Class 384: Bearings

Bearings, designed for general use, where one element continuously bears the weight of another, either suspended, or imposed, and wherein there is either linear motion, rotary motion, or oscillating movement, between the two elements. The bearings may have either sliding, or rolling contact with the supported member. The class includes (a) supports for bearings; (b) antifriction means; and (c) lubricating devices.

Subclass 54: Resilient member

Class 250: Radiant Energy

This class provides for all methods and apparatus for using, generating, controlling or detecting radiant energy, combinations including such methods or apparatus, subcombinations of same and accessories therefore not classifiable elsewhere.

Subclass 250: RADIO AND MICROWAVE ABSORPTION WAVEMETERS
Subclass 305: ELECTRON ENERGY ANALYSIS
Subclass 306: INSPECTION OF SOLIDS OR LIQUIDS BY CHARGED PARTICLES
Subclass 307: Methods
Subclass 310: Electron probe type
Subclass 311: Electron microscope type
Subclass 370.01: Semiconductor system
Subclass 370.08: Imaging system
Subclass 370.09: X-ray or gamma-ray system
Subclass 548: Controlling web, strand, strip, or sheet
Subclass 214VT: Vacuum tube type
Subclass 234: Means for moving optical system
Subclass 396R: WITH CHARGED PARTICLE BEAM DEFLECTION OR FOCUSSING
Subclass 397: With detector
Subclass 398: With target means
Subclass 396ML: Magnetic lens
Subclass 423P: Photoionization type
Subclass 491.1: MEANS TO ALIGN OR POSITION AN OBJECT RELATIVE TO A SOURCE OR DETECTOR
Subclass 492.1: IRRADIATION OF OBJECTS OR MATERIAL
Subclass 492.2: Irradiation of semiconductor devices
Subclass 492.21: Ion bombardment
Subclass 492.22: Pattern control
Subclass 492.23: Variable beam
Subclass 492.24: Photocathode projection
Subclass 492.3: Ion or electron beam irradiation
Subclass 494.1: Plural radiation sources

Class 239: Fluid Sprinkling, Spraying, And Diffusing

The general class for claims pertaining to the spraying, sprinkling, or scattering of fluids or fluent solids either in the form of slurries or as dry material, over an extended area on a surface, including - weather control or modification, diffusers, fountains, drinking tubes and straw, dry pulverulent material, terminal fluid handling elements and orifice shapes.

Subclass 1: PROCESSES
Subclass 499: Chamber-like deflector
Subclass 524: Transverse planar or dished surface type

Class 454: Ventilation

This is the parent class for apparatus and processes for supplying air to and removing it from enclosures, for distributing and circulating the air therein, or for preventing its contamination.

Subclass 310: Concentric

Class 313: Electric Lamp And Discharge Devices

This is the generic class for electric lamp and electric space discharge device structure. Examples of such devices are electric incandescent lamps, gas or vapor filled electric discharge tubes, including lamps, mercury arc devices, vacuum discharge tubes, radio tubes, cyclotrons, cathode-ray tubes, photosensitive discharge devices, secondary emission electron multipliers, spark plugs, and open air arc and spark devices.

Subclass 359.1: WITH POSITIVE OR NEGATIVE ION ACCELERATION
Subclass 361.1: Means for deflecting or focusing
Subclass 363.1: Extraction or target electrode
Subclass 530: With photocathode on envelope
Subclass 541: Having photocathode on tube wall
Subclass 542: Photocathode
Subclass 103R: Secondary emitter type (e.g., electron multiplier)
Subclass 103CM: Channel multiplier
Subclass 104: Plural secondary emissive electrodes
Subclass 153: WITH MAGNETIC DEVICE
Subclass 155: Electrode generates field
Subclass 158: Pole pieces facing electrode ends
Subclass 289: Ceramic or insulating support
Subclass 336: Point source cathodes

Class 358: Facsimile And Static Presentation Processing

Communication or reproduction of a static image or sequence of static images in which the local light, or density variations composing the image do not vary with time by a method or apparatus involving at least one of the following steps: (1) scanning a static image to capture an image-containing area by resolving it into an area; (2) communication of an image-representative signal or image-representative data over any supporting communication network; or (3) reproduction of an image-containing area in response to an image-representative signal or image-representative image data by reproducing a corresponding image area which at least one of the two dimensions is elemental, simultaneously or in a sequence. In this class, a facsimile system or method is a system or method for the communication or reproduction of an arbitrarily composed image in which the local light, or density variations composing the image do not vary with time, such as documents maps, charts, photographs, etc., but not motion picture film or video.

Subclass 1.2: Size, resolution, or scale control
Subclass 1.8: Dot matrix array (e.g., printheads, etc.)
Subclass 1.9: Attribute control
Subclass 3.01: Multi-level image reproduction (e.g., gray level reproduction)
Subclass 3.06: Halftoning (e.g., a pattern of print elements used to represent a gray level)
Subclass 3.21: Adaptive multi-level image reproduction

Class 345: Computer Graphics Processing And Selective Visual Display Systems

Processes and apparatus for selective electrical control of two or more light-generating or light-controlling display elements* in accordance with a received or stored image data signal. The image data includes character, graphical information or display attribute data. The image data may include, for example, information data from a peripheral input device, from the reception of a television signal, from the recognition of image data, or from the generation or creation of image data by a computer.

Subclass 204: DISPLAY DRIVING CONTROL CIRCUITRY
Subclass 206: Having common base or substrate
Subclass 441: Shape generating
Subclass 502: Plural graphics processors
Subclass 690: Intensity or color driving control (e.g., gray scale)

Class 335: Electricity: Magnetically Operated Switches, Magnets, And Electromagnets

Electric current switching devices or relays of general application for closing or opening electrical circuits which devices are magnetically operated or to magnet structure, per se, either electromagnets or permanent magnets, adapted for use as a source of magnetic flux for performing external work. Included are devices of the electrodynamic type wherein mutually coupled conductors are caused to move relative to each other by the interaction of the magnetic fields produced by the flow of electric currents in the conductors. Combinations of magnetically actuated circuit makers and breakers or work magnets and electromagnets with electrical connector plugs, sockets or other special type housings or casings.

Subclass 210: Electron or ion beam deflecting type

Class 700: Data Processing: Generic Control Systems Or Specific Applications

This class is structured into two main divisions: (1)for the combination of a data processing or calculating computer apparatus (or corresponding methods for performing data processing or calculating operations) AND a device or apparatus controlled thereby, the entirety hereinafter referred to as a "control system". (2)for data processing or calculating computer apparatus (or corresponding methods for performing data processing or calculating operations) wherein the data processing or calculating computer apparatus is designed for or utilized in a particular art device, system, process, or environment, or is utilized for the solution of a particular problem in a field other than mathematics (arithmetic processing per se is classified elsewhere).

Subclass 121: Integrated circuit production or semiconductor fabrication

Class 430: Radiation Imagery Chemistry: Process, Composition, Or Product Thereof

This is the generic class for: (1) Forming the likeness of an object, or an instrumented or discernible phenomenon, in a chemically defined receiver or in a receiver wherein radiation produces a chemical reaction, by use of radiation. (2) Finishing an image by chemical processing regardless how formed. (3) A radiation sensitive receiver, composition, or product disclosed solely for radiation imagery chemistry, and process of making same. (4) A nonradiation sensitive-receiver, composition, or product. (5) An imaged product by a process or employing a receiver, composition, or product.

Subclass 5: Radiation mask
Subclass 22: REGISTRATION OR LAYOUT PROCESS OTHER THAN COLOR PROOFING
Subclass 30: INCLUDING CONTROL FEATURE RESPONSIVE TO A TEST OR MEASUREMENT
Subclass 270.1: Radiation sensitive composition or product or process of making
Subclass 291: Post imaging treatment with particles
Subclass 296: Electron beam imaging
Subclass 313: With formation of resist image, and etching of substrate or material deposition
Subclass 321: Optical device

Class 257: Active Solid-State Devices (E.G., Transistors, Solid-State Diodes)

This class provides for active solid-state electronic devices, that is, electronic devices or components that are made up primarily of solid materials, usually semiconductors, which operate by the movement of charge carriers - electrons or holes - which undergo energy level changes within the material and can modify an input voltage to achieve rectification, amplification, or switching action, and are not classified elsewhere.

Subclass 48: TEST OR CALIBRATION STRUCTURE
Subclass 428: Electromagnetic or particle radiation
Subclass 429: Charged or elementary particles
Subclass 680: With window means
Subclass 797: ALIGNMENT MARKS
Subclass E23.179: Marks applied to semiconductor devices or parts, e.g., registration marks, test patterns, alignment structures, wafer maps (EPO)
Subclass E21.226: Dry cleaning (EPO)
Subclass E21.525: Procedures, i.e., sequence of activities consisting of plurality of measurement and correction, marking or sorting steps (EPO)

Class 378: X-Ray Or Gamma Ray Systems Or Devices

This is the generic class for apparatus and corresponding processes involving the generation or use of electromagnetic radiation within the X-ray spectrum. Methods, systems, and elements with specific features characteristic of X-ray applications are classified here.

Subclass 189: NONPHOTOGRAPHIC DETECTOR SUPPORT
Subclass 35: Pattern mask

Class 438: Semiconductor Device Manufacturing: Process

This class provides for manufacturing a semiconductor containing a solid-state device for the following purposes: (a) conducting or modifying an electrical current, (b) storing electrical energy for subsequent discharge within a microelectronic integrated circuit, or (c) converting electromagnetic wave energy to electrical energy or electrical energy to electromagnetic energy. Also operations involving: (1) coating a substrate with a semiconductive material, or (2) coating a semiconductive substrate or substrate containing a semiconductive region. It also provides for operations involving etching a semiconductive substrate or etching a substrate containing a semiconductive region. The class provides for packaging or treatment of packaged semiconductor.

Subclass 106: PACKAGING (E.G., WITH MOUNTING, ENCAPSULATING, ETC.) OR TREATMENT OF PACKAGED SEMICONDUCTOR
Subclass 107: Assembly of plural semiconductive substrates each possessing electrical device
Subclass 108: Flip-chip-type assembly
Subclass 109: Stacked array (e.g., rectifier, etc.)
Subclass 401: Having substrate registration feature (e.g., alignment mark)
Subclass 473: By implanting or irradiating
Subclass 7: Optical characteristic sensed
Subclass 795: RADIATION OR ENERGY TREATMENT MODIFYING PROPERTIES OF SEMICONDUCTOR REGION OF SUBSTRATE (E.G., THERMAL, CORPUSCULAR, ELECTROMAGNETIC, ETC.)
Subclass 949: Energy beam treating radiation resist on semiconductor
Subclass 975: SUBSTRATE OR MASK ALIGNING FEATURE

Class 850:


Class 356: Optics: Measuring And Testing

Methods and apparatus (1) for analyzing light to measure or test its characteristics, such as intensity, color and polarization; (2) for determining the optical or nonoptical properties of materials or articles by noting, as by inspection, measurement, or test the effect produced by the materials or articles on light associated therewith; and (3) for measuring the dimensions of structures or the spatial relationships such as distances or angle bearings of spaced points by comparison of the respective properties (usually direction or spatial position) of the light from these points or by comparison of the properties of these lights with some scale or standard. The light analyzing includes or is for spectroscopy, interference, polarization, beam direction or pattern, focal position of a light source, shade or color, and photometers. The material or article properties determined are or involve crystal or gem examination, material strain analysis, blood analysis, optical pyrometers, egg candling, cutting blade sharpness, oil testing, document verification, flatness, lens or reflector testing, refraction testing, monitoring moving webs or fabrics, light transmission or absorption, light reflection, inspection for flaws or imperfections in materials, and thread counting. The dimensioning and spatial relationship determination includes triangulation by a light beam, contour plotting, range or height finders, motion stopping, velocity or velocity/height measuring, sighting where the optical element or reticle moves with the sighted object, particle size determination, particle light scattering, electrophoresis, angle measuring or axial alignment, mensuration or configuration comparison, alignment in a lateral direction, and fiducial instruments.

Subclass 396: With scale or optical grid displaced relative to remote fiducial mark
Subclass 496: For dimensional measurement

Class 445: Electric Lamp Or Space Discharge Component Or Device Manufacturing

This is the residual and generic class of process and apparatus for the manufacturing, fabrication, repair, salvage, assembly, disassembly or other treatment of an electric lamp, liquid crystal display device or an electric space discharge device which process or apparatus is not elsewhere classified.

Subclass 24: Display or gas panel making
Subclass 25: With sealing
Subclass 35: Electrode making
Subclass 46: Electrode making
Subclass 50: Emissive type

Class 359: Optical: Systems And Elements

Optical elements included in this class are: Lenses; Polarizers; Diffraction gratings; Prisms; Reflectors; Filters; Projection screens; Optical Modulators; Optical Demodulators. Among the optical systems included in this class are: Compound lens systems; Light reflecting signalling systems (e.g., retroreflectors); stereoscopic systems; Binocular devices; Systems of lenticular elements; Systems involving light interference; Glare reducing systems; Light dividing and combining systems; Light control systems (e.g., light valves); building illumination with natural light; Systems for protecting or shielding elements; Optical systems whose operation depends upon polarizing, diffracting, dispersing, reflecting, or refracting light; kaleidoscopes. Further included are certain apertures, closures, and viewing devices of a specialized nature which involve no intentional reflection, refraction, or filtering of light rays. This class also includes optical elements combined with another type of structure(s) to constitute an optical element combined with a nonoptical structure or a perfection or improvement in the optical element.

Subclass 819: Lens mounts

Class 702: Data Processing:Measuring, Calibrating, Or Testing

This class provides for apparatus and corresponding methods wherein the data processing system or calculating computer is designed for or utilized in an environment relating to a specific or generic measurement system, a calibration or correction system, or a testing system.

Subclass 117: Of circuit
Subclass 118: Testing multiple circuits
Subclass 181: Probability determination
Subclass 84: Quality control

Class 156: Adhesive Bonding And Miscellaneous Chemical Manufacture

This is the generic class for: Manufacturing processes and apparatus; manufacture of articles of commerce in which one of the manufacturing steps includes a chemical reaction; manufacture of panels from settable inorganic compositions; manufacture of electrical conductors of indefinite length.

Subclass 345.1: DIFFERENTIAL FLUID ETCHING APPARATUS

Class 310: Electrical Generator Or Motor Structure

This is the residual class for all subject matter, not elsewhere classified, relating to electrical generator or motor structure.

Subclass 328: With mechanical energy coupling means

Class 382: Image Analysis

This is the generic class for apparatus and corresponding methods for the automated analysis of an image or recognition of a pattern. Included herein are systems that transform an image for the purpose of (a) enhancing its visual quality prior to recognition, (b) locating and registering the image relative to a sensor or stored prototype, or reducing the amount of image data by discarding irrelevant data, and (c) measuring significant characteristics of the image.

Subclass 141: Manufacturing or product inspection
Subclass 144: Mask inspection (e.g., semiconductor photomask)
Subclass 145: Inspection of semiconductor device or printed circuit board
Subclass 167: Color correction
Subclass 181: PATTERN RECOGNITION
Subclass 203: Shape and form analysis
Subclass 209: Template matching (e.g., specific devices that determine the best match)
Subclass 254: IMAGE ENHANCEMENT OR RESTORATION
Subclass 279: Convolution

Class 355: Photocopying

Apparatus and methods for photos: graphically copying information from an original or carrier that is not classified elsewhere, generally employing a concentrated source of light and an image receiving medium with a photosensitive emulsion surface. Various plural and composite types of copies are included such as those involving plural projected images including multicolor and duplex.

Subclass 53: Step and repeat
Subclass 55: Focus or magnification control
Subclass 67: Illumination systems or details
Subclass 77: Methods

Class 242: Winding, Tensioning, Or Guiding

Subclass 163: Interconvolutionary strand delivery
Subclass 441: Having mechanism to distribute convolutions
Subclass 447: Having mechanism for distributing convolutions

Class 708: Electrical Computers: Arithmetic Processing And Calculating

This is the generic class for electrical apparatus and corresponding methods for performing calculation operations. There are three main divisions: 1. electrical hybrid calculating computers; 2. electrical digital calculating computers; 3. electrical analog calculating computers.

Subclass 5: Correlation, convolution, or transformation
Subclass 420: Convolution
Subclass 813: Correlation or convolution

Class 347: Incremental Printing Of Symbolic Information

Processes and apparatus for conveying information by selectively creating on a medium a visibly distinguishable symbol or mark composed of a plurality of portions; created portion by portion as, for example, by pixels or dots. The symbol or mark may be an alphanumeric character or an image.

Subclass 19: Measuring and testing (e.g., diagnostics)
Subclass 233: Plural beam scan
Subclass 239: Specific light modulator
Subclass 24: For color
Subclass 241: Specific optical structure
Subclass 256: Specific optical structure

Class 205: Electrolysis: Processes, Compositions Used Therein, And Methods Of Preparing The Compositions

Processes (1) involving the use of electrolysis (2) of preparing or purifying compounds or elements involving chemical reaction brought about by electrical or wave energy in a magnetic field; (3) of treating materials involving chemical reaction brought about by wave energy; (4) of preparing or purifying compounds or elements involving chemical reaction brought about by an electrostatic field or electrical discharge; (5) involving the use of electrophoresis or electro-osmosis; (6) of treating a liquid (a) to separate or purify the liquid using electric and magnetic fields simultaneously, (b) to separate or purify the liquid using an electric field, or (c) using a magnetic field to obtain some effect other than mere separation or purification of the liquid; (7) involving coating, forming, or etching by the use of sputtering; and (8) involving coating by the use of vacuum arc discharge. Electrolyte compositions specialized for use in electrolytic processes or methods of preparing the compositions.

Subclass 775: ELECTROLYTIC ANALYSIS OR TESTING (PROCESS AND ELECTROLYTE COMPOSITION)
Subclass 787: For organic compound
Subclass 81: Involving measuring, analyzing, or testing

Class 204: Chemistry: Electrical And Wave Energy

This class includes, where not provided for elsewhere: A. Processes (1) involving the use of electrolysis (as provided for in Class 205); (2) of preparing or purifying compounds or elements involving chemical reaction brought about by electrical or wave energy in a magnetic field; (3) of treating materials involving chemical reaction brought about by wave energy; (4) of preparing or purifying compounds or elements involving chemical reaction brought about by an electrostatic field or electrical discharge; (5) involving the use of electrophoresis or electro-osmosis; (6) of treating a liquid (a) to separate or purify the liquid using electric and magnetic fields simultaneously, (b) to separate or purify the liquid using an electric field, or (c) using a magnetic field to obtain some effect other than mere separation or purification of the liquid; (7) involving coating, forming, or etching by the use of sputtering; and (8) involving coating by the use of vacuum arc discharge.

Subclass 400: Analysis and testing
Subclass 434: Involving plating, coating or stripping

Class 361: Electricity: Electrical Systems And Devices

Systems or devices which provide safety and protection for other systems and devices; control circuits for electromagnetic devices and non-electromagnetic-type relays. Systems or devices which discharge, or prevent the accumulation of electrical charge on or in an object or material; circuits for charging objects or materials. Systems for generating or conducting an electric charge. Systems which process electrical speed signals. Circuits for reversing the polarity of an electric circuit. Systems which cause the ignition of a fuel or an explosive charge. Systems and processes for demagnetizing a magnetic field. Transformers and inductors with integral switch, capacitor or lock. Electrostatic capacitors, per se. Housings and mounting assemblies with plural diverse electrical components. Electrolytic systems and devices.

Subclass 234: Pinning

Class 379: Telephonic Communications

(1) Systems, processes and instruments for the two-way electrical transmission of intelligible audio information having arbitrary content over a link including an electrical conductor, between spaced apart locations, so as to enable conversation therebetween, and intended for the private use of a listener or a group of listeners. The term "intelligible" used above is intended to include the capability for transmission of speech or the like (e.g., music), rather than restriction to a specified audible signal, such as a bell or buzzer. (2) Switching, signalling or signal transmission peculiar to, or specified as for a telephone or a telephone system, except for multiplex communications as indicated in Lines With Other Classes.

Subclass 406.11: Convolution processing

Class 341: Coded Data Generation Or Conversion

1) originating or emitting a coded set of discrete signals or 2) translating one code into another code wherein the information signal content remains the same but the formats may differ. For classification herein, at least one of the codes must be a set of pulses or digits and electrical in nature.

Subclass 14: Having optical waveguide
Subclass 144: Digital to analog conversion

Class 324: Electricity: Measuring And Testing

This is the residual home for all subject matter, not elsewhere classified, relating to the measuring, testing (or sensing) of electric properties, (e.g., determining ground resistivity, determining frequency of an alternating current, determining kilowatt hour demand), or the measuring, testing or sensing of nonelectric properties by electric means (e.g., determining moisture, a nonelectric property, by measuring conductance with a resistance bridge; determining speed, a nonelectric property by use of an electric tachometer).

Subclass 71.3: Beam of atomic particles

Class 716: Data Processing: Design And Analysis Of Circuit Or Semiconductor Mask

This class provides for electrical data processing apparatus and corresponding methods for the following subject matter: for sketching, designing, and analyzing circuit components; for planning, designing, analyzing, and devising a template used for etching circuit pattern on semiconductor wafers.

Subclass 11: Layout editor (e.g., updating)
Subclass 19: DESIGN OF SEMICONDUCTOR MASK
Subclass 21: Pattern exposure
Subclass 8: Floorplanning

European Patent Classes & Classifications Covered in this listing:

Class G03F7: PHYSICS - PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY

PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; . Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor .