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Patent for Sale:

Fabrication of Diamond Nanopillars and Their Arrays    

Construction of diamond nanopillars, their arrays and their fabrication technology.


The invention combines the deposition of diamond films, the coating of etching mask on the diamond films, and bias-assisted reactive ion etching process. A new type of diamond nanopillars, their arrays and methods for their fabrication. The fabrication technique is applicable to any structure of diamond films ranging from microcrystalline to nanocrystalline. The fabrication method is capable of forming diamond nanopillar arrays over large areas with great uniformity and high reproducibility, and the geometry and density of the nanopillars can be controlled.

The method invented is extremely simple and it fabricates uniform and high-density diamond nanopillar and their arrays.

Primary Application of the Technology

Great potential application in biomedical sensors, electrochemical microelectrodes, field emission devices, and probe testing instruments including scanning probe microscopy (SPM).

Patent Summary

U.S. Patent Classes & Classifications Covered in this listing:

Class 438: Semiconductor Device Manufacturing: Process

This class provides for manufacturing a semiconductor containing a solid-state device for the following purposes: (a) conducting or modifying an electrical current, (b) storing electrical energy for subsequent discharge within a microelectronic integrated circuit, or (c) converting electromagnetic wave energy to electrical energy or electrical energy to electromagnetic energy. Also operations involving: (1) coating a substrate with a semiconductive material, or (2) coating a semiconductive substrate or substrate containing a semiconductive region. It also provides for operations involving etching a semiconductive substrate or etching a substrate containing a semiconductive region. The class provides for packaging or treatment of packaged semiconductor.

Subclass 694: Combined with coating step

Class 216: Etching A Substrate: Processes

Chemical etching processes for treating articles of commerce or intermediate articles not otherwise provided for in which one of the manufacturing steps includes a chemical etching step (use of an etchant) and wherein the material treated is not completely removed.

Subclass 51: Mask resist contains inorganic material

Class 257: Active Solid-State Devices (E.G., Transistors, Solid-State Diodes)

This class provides for active solid-state electronic devices, that is, electronic devices or components that are made up primarily of solid materials, usually semiconductors, which operate by the movement of charge carriers - electrons or holes - which undergo energy level changes within the material and can modify an input voltage to achieve rectification, amplification, or switching action, and are not classified elsewhere.

Subclass E21.249: Etching insulating layer by chemical or physical means (EPO)