Tynax ~ Patent Library

Patent for Sale:

Deposition Technique for Heteroepitaxial Diamond    

Diamond growth and a technique of nucleating and growing heteroepitaxial diamond thin films.


The technology relates to a two-step diamond growth technique based on ECR-MPCVD which enables the growth of high quality heteroepitaxial diamond thin film on silicon substrate.

The invention provides a two-step method to grow large area high quality diamond thin film at low cost.

Primary Application of the Technology

Semiconductors, transistors, LED, passive sensors, thermal management components, optical elements, chemical electrodes

Patent Summary

U.S. Patent Classes & Classifications Covered in this listing:

Class 117: Single-Crystal, Oriented-Crystal, And Epitaxy Growth Processes; Non-Coating Apparatus Therefor

Processes consisting of the single or repeated unit operation of forming a single-crystal of any type of material, including inorganic or organic; such processes combined with perfecting operations; and apparatus for conducting non-coating processes of this class.

Subclass 101: Characterized by specified crystallography or arrangement of substrate (e.g., wafer cassette, Miller index)
Subclass 104: Using an organic precursor (e.g., propane, metal-organic, MOCVD, MOVPE)

Class 204: Chemistry: Electrical And Wave Energy

This class includes, where not provided for elsewhere: A. Processes (1) involving the use of electrolysis (as provided for in Class 205); (2) of preparing or purifying compounds or elements involving chemical reaction brought about by electrical or wave energy in a magnetic field; (3) of treating materials involving chemical reaction brought about by wave energy; (4) of preparing or purifying compounds or elements involving chemical reaction brought about by an electrostatic field or electrical discharge; (5) involving the use of electrophoresis or electro-osmosis; (6) of treating a liquid (a) to separate or purify the liquid using electric and magnetic fields simultaneously, (b) to separate or purify the liquid using an electric field, or (c) using a magnetic field to obtain some effect other than mere separation or purification of the liquid; (7) involving coating, forming, or etching by the use of sputtering; and (8) involving coating by the use of vacuum arc discharge.

Subclass 173: Carbon

Class 423: Chemistry Of Inorganic Compounds

This class provides for what is generally termed the field of inorganic chemistry. It includes inorganic compounds, nonmetallic elements and processes of producing the same involving a chemical reaction. The products are generally in a relatively pure state but may be a mixture with no other utility than as a source material for an inorganic compound or element. This includes metal compound products useful in metallurgical processes of obtaining free metals.

Subclass 446: Diamond

Class 427: Coating Processes

This is the generic class for: A. applying or obtaining a coating on a surface. The coating may be hard or soft, permanent or transitory, supplied solely by extraneous materials or supplied wholly or in part by the base material. B. impregnating a base by causing a coating material to extend or penetrate into the base material, or into the interstices of a porous, cellular or foraminous material. C. taking preparatory treatments of the base material, subsequent treatments of the coated base material and other ancillary noncoating operations claimed, per se, processes limited to etching for making a base more compatible with, or adherent to, the coating wherein the base is the substrate (work) onto which a coating is applied are included.

Subclass 450: Inorganic carbon containing coating, not as steel (e.g., carbide, etc.)
Subclass 577: Inorganic carbon containing coating material, not as steel (e.g., carbide, etc.)