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Patent for Sale:

Single Crystal Diamond Tips and Arrays Fabrication    

The technology relates to the generation/fabrication of sharp single crystal diamond tips and their arrays.

Overview

The technology combines the deposition of synthetic diamond films with reactive etching processes and facilitates the production of single crystal diamond tips with an apical angel of no more than about 28 deg and a tip radius smaller than 50 nm on pyramidal-shaped-textured diamond films.

The method is capable of forming diamond tip arrays over large areas with great uniformity and high reproducibility. The technology enables the control of the apical angel, radius and density of the single crystal diamond tips which is more reliable than silicon/polycrystalline diamond tips.

Primary Application of the Technology

The single crystal diamond tips could be used in probe testing instrument techniques including scanning probe microscopy and nanoindentation, nanomechanics and nanomachining the progressing MEMS devices industries and field emission applications.

Patent Summary

U.S. Patent Classes & Classifications Covered in this listing:

Class 423: Chemistry Of Inorganic Compounds

This class provides for what is generally termed the field of inorganic chemistry. It includes inorganic compounds, nonmetallic elements and processes of producing the same involving a chemical reaction. The products are generally in a relatively pure state but may be a mixture with no other utility than as a source material for an inorganic compound or element. This includes metal compound products useful in metallurgical processes of obtaining free metals.

Subclass 446: Diamond

Class 117: Single-Crystal, Oriented-Crystal, And Epitaxy Growth Processes; Non-Coating Apparatus Therefor

Processes consisting of the single or repeated unit operation of forming a single-crystal of any type of material, including inorganic or organic; such processes combined with perfecting operations; and apparatus for conducting non-coating processes of this class.

Subclass 68: Having growth from a solution comprising a solvent which is liquid at or below 20 degrees Celsius (e.g., aqueous solution)
Subclass 89: Including change in a growth-influencing parameter (e.g., composition, temperature, concentration, flow rate) during growth (e.g., multilayer or junction or superlattice growing)
Subclass 90: With pretreatment of substrate (e.g., coacting ablating)
Subclass 94: With pretreatment or preparation of a base (e.g., annealing)
Subclass 95: Coating (e.g., masking, implanting)
Subclass 97: Material removal (e.g., etching, cleaning, polishing)