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Patent for Sale:

A Re-igniting Device for Vacuum Arc Plasma Source    

A method and apparatus for automatically re-igniting vacuum arc plasma source.

Overview

The technology relates to methods for automatically re-igniting a vacuum arc (DC or long pulse AC) plasma source by monitoring the increase of main power supply voltage. The re-ignition signal will be sent to cathode when voltage exceeds certain level just before the arc completely extinguishes.

This technology sustains a continuous vacuum arc plasma source. It enhances vacuum arc deposition by minimizing pressure fluctuations in the deposition process. A mechanical trigger is not required.

Primary Application of the Technology

Plasma immersion ion implantation, vacuum arc plasma source

Patent Summary

U.S. Patent Classes & Classifications Covered in this listing:

Class 219: Electric Heating

This class includes all those devices commonly known as electric heaters, electric-heating metal working apparatus, electrically-heated tools and instruments. This is the generic class for electric heating devices, per se. Devices and systems equipped with electric heating means in which the electric heating means is combined with or includes specific other art structure whereby the heated material is withdrawn, stored or otherwise utilized will also be classified in the appropriate other art class to which it pertains.

Subclass 121.54: Control systems
Subclass 121.57: Arc ignition
Subclass 121.59: Methods