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Electron Beam Lithography    

Convert multiple optical beams to electron beams for the purpose of direct write using a photocathode.

Overview

Reduces the current fluctuations of large arrays of field emitters through mutliple exposures. Provides the resolution of electron beam imaging system, the simplicity of optical systems, and the high throughput of mask or massively parallel writing system, but does so without the use of a mask.

Combines the advantages of raster scanning and frame projection. It borrows technology from flip-chip packaging and multi-chip modules, providing high signal density connections across a vacuum wall.

Arrangement of dual, opposing air bearings improves any work-piece deflection variability, which ordinarily complicates precision motion or normalization of precision measurements.

Patent Summary

U.S. Patent Classes & Classifications Covered in this Patent:

Class 250: Radiant Energy

This class provides for all methods and apparatus for using, generating, controlling or detecting radiant energy, combinations including such methods or apparatus, subcombinations of same and accessories therefore not classifiable elsewhere.

Subclass 398: With target means
Subclass 400: With means to convey or guide the target
Subclass 492.2: Irradiation of semiconductor devices
Subclass 492.22: Pattern control
Subclass 492.24: Photocathode projection
Subclass 492.3: Ion or electron beam irradiation

Class 378: X-Ray Or Gamma Ray Systems Or Devices

This is the generic class for apparatus and corresponding processes involving the generation or use of electromagnetic radiation within the X-ray spectrum. Methods, systems, and elements with specific features characteristic of X-ray applications are classified here.

Subclass 34: Lithography
Subclass 35: Pattern mask

Class 355: Photocopying

Apparatus and methods for photos: graphically copying information from an original or carrier that is not classified elsewhere, generally employing a concentrated source of light and an image receiving medium with a photosensitive emulsion surface. Various plural and composite types of copies are included such as those involving plural projected images including multicolor and duplex.

Subclass 53: Step and repeat
Subclass 67: Illumination systems or details
Subclass 69: Electricity to lamp controlled
Subclass 70: Plural lamps

Class 430: Radiation Imagery Chemistry: Process, Composition, Or Product Thereof

This is the generic class for: (1) Forming the likeness of an object, or an instrumented or discernible phenomenon, in a chemically defined receiver or in a receiver wherein radiation produces a chemical reaction, by use of radiation. (2) Finishing an image by chemical processing regardless how formed. (3) A radiation sensitive receiver, composition, or product disclosed solely for radiation imagery chemistry, and process of making same. (4) A nonradiation sensitive-receiver, composition, or product. (5) An imaged product by a process or employing a receiver, composition, or product.

Subclass 30: INCLUDING CONTROL FEATURE RESPONSIVE TO A TEST OR MEASUREMENT
Subclass 296: Electron beam imaging
Subclass 311: Making electrical device
Subclass 322: Forming nonplanar surface

Class 118: Coating Apparatus

pparatus for applying or obtaining a surface coating on a base and/or apparatus for impregnating base materials and takes all such apparatus not provided for in other classes. The coating obtained may be permanent or transitory. The coating may be supplied solely by extraneous materials, as in a painting or waxing operation, or may be supplied wholly or in part by the base materials as in the formation of an oxide coating on a metal base. The coating may consist of an emulsion, dispersion, solution, admixture or oil which is clearly disclosed as leaving a residual film, layer or continuous deposit on the base.

Subclass 724: By means to heat or cool
Subclass 725: Substrate heater
Subclass 728: Work support
Subclass 729: Moving work support
Subclass 733: Chamber seal

Class 156: Adhesive Bonding And Miscellaneous Chemical Manufacture

This is the generic class for: Manufacturing processes and apparatus; manufacture of articles of commerce in which one of the manufacturing steps includes a chemical reaction; manufacture of panels from settable inorganic compositions; manufacture of electrical conductors of indefinite length.

Subclass 345.51: With workpiece support
Subclass 345.52: With means to heat the workpiece support
Subclass 345.53: With means to cool the workpiece support
Subclass 345.54: With means to move the workpiece inside the etching chamber

Class 277: Seal For A Joint Or Juncture

A sealing means or a process of using a seal to act at a joint or juncture of adjacent parts to oppose passage of a fluid. The sealing means or process: (1) closes a space formed between or (2) deflects the fluid away from the joint or juncture by using the fluid, another fluid, or an article.

Subclass 345: SEAL BETWEEN RELATIVELY MOVABLE PARTS (I.E., DYNAMIC SEAL)

Class 384: Bearings

Bearings, designed for general use, where one element continuously bears the weight of another, either suspended, or imposed, and wherein there is either linear motion, rotary motion, or oscillating movement, between the two elements. The bearings may have either sliding, or rolling contact with the supported member. The class includes (a) supports for bearings; (b) antifriction means; and (c) lubricating devices.

Subclass 134: Gas

Class 174: Electricity: Conductors And Insulators

This class is for inventions relating to the structure of electrical conductors and insulators and insulators and the apparatus specialized to mounting, supporting, encasing in conduits, and/or housing the same. Conductors may be bare or be encased in insulation, may be single strand or plural strand, may be of single conductor form or there may be a plurality of conductors associated together to form a cable. Since all materials that have the property of being conductors of electricity and all devices made therefrom may be termed electrical conductors, only those structures that are specially designed to conduct electricity as their proximate purpose are placed in this class. Insulators are placed here when the structure thereof is claimed, which structure is specially designed for spacing two or more devices of different electrical potential from each other or for spacing one or more devices from ground. Since all materials which are poor conductors of electricity and devices made therefrom may be termed electrical insulators, only those structures whose proximate purpose is that already stated. Conduits are placed in this class only when some characteristic is claimed which limits the same to the electrical use.

Subclass 8: WITH FLUIDS OR VACUUM
Subclass 17SF: Solid filled
Subclass 50.56: Lead-in insulated from metal wall
Subclass 151: Through wall or plate

Class 315: Electric Lamp And Discharge Devices: Systems

Electric lamp and electric space discharge device systems: structural combinations with circuit elements; structural combinations with heating and/or cooling means; cathode-ray tubes; lamps and/or discharge devices as sole load devices; lamps; electric space discharge devices gas or vapor discharge devices; high vacuum-type discharge devices, and gas or vapor-type discharge devices claimed broadly; plural load device systems; art uses and combinations with art devices; testing electric lamps and discharge devices; and operating a lamp or a gas or vapor discharge device.

Subclass 167: Plural cathode and/or anode load device

European Patent Classes & Classifications Covered in this Patent:

Class G03F7: PHYSICS - PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY

PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; . Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor .

Class H01J37: ELECTRICITY - BASIC ELECTRIC ELEMENTS

ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS . Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof .

Class Y01N4: GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS - BROAD TECHNICAL FIELDS CHARACTERISED BY DIMENSIONAL ASPECTS

NANOTECHNOLOGY . Nanotechnology for information processing, storage and transmission .

Class G06F3: PHYSICS - COMPUTING; CALCULATING; COUNTING

ELECTRICAL DIGITAL DATA PROCESSING . Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements .

Class G10L15: PHYSICS - MUSICAL INSTRUMENTS; ACOUSTICS

SPEECH ANALYSIS OR SYNTHESIS; SPEECH RECOGNITION . Speech recognition .