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Patent for Sale:

Integrated Scrubber System for Ion Implanter    

Abatement and scrubbing system for ion implanter


An system for abatement and scrubbing of ion implantation process system. A supply of source gas for the ion implantation process is arranged to flow to the ion implanter apparatus, which discharges an effluent gas stream including ionization products of the source gas during the ion implantation process. The system includes an effluent abatement apparatus for removing hazardous effluent species from the effluent gas stream. A novel scrubbing composition is employed for effluent treatment. The scrubbing composition breakthrough of scrubbable component is monitored with a device such as a quartz microbalance monitor.

Primary Application of the Technology


Other Potential Applications

Optical components

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Patent Summary

U.S. Patent Classes & Classifications Covered in this Patent:

Class 118: Coating Apparatus

pparatus for applying or obtaining a surface coating on a base and/or apparatus for impregnating base materials and takes all such apparatus not provided for in other classes. The coating obtained may be permanent or transitory. The coating may be supplied solely by extraneous materials, as in a painting or waxing operation, or may be supplied wholly or in part by the base materials as in the formation of an oxide coating on a metal base. The coating may consist of an emulsion, dispersion, solution, admixture or oil which is clearly disclosed as leaving a residual film, layer or continuous deposit on the base.

Subclass 723CB: Ion cluster beam
Subclass 723R: By creating electric field (e.g., gas activation, plasma, etc.)

Class 423: Chemistry Of Inorganic Compounds

This class provides for what is generally termed the field of inorganic chemistry. It includes inorganic compounds, nonmetallic elements and processes of producing the same involving a chemical reaction. The products are generally in a relatively pure state but may be a mixture with no other utility than as a source material for an inorganic compound or element. This includes metal compound products useful in metallurgical processes of obtaining free metals.

Subclass 240S: Solid removal agent