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Patent Portfolio for Sale:

Chemical Mechanical Polishing System IP Assets Head/Pad/Fluids/Process/Sensors/Control    

Chemical Mechanical Polishing a full system IP portfolio

Overview

A complete set of patents related to apparatus, methods, process and controls of chemical mechanical polishing technology. The IP asset includes hardware, designs, process, sensors and process controls. Various aspects of the mechanical and chemical polishing are addressed as well as sensors and process controls to provide a complete polishing system.

Primary Application of the Technology

Semiconductor

Other Potential Applications

High resolution and tightly control polishing of optical elements and hard disk drives

The seller would like to be granted a license back.

Patent Summary

U.S. Patent Classes & Classifications Covered in this listing:

Class 451: Abrading

The term "abrading" (grinding) may include a polishing device that acts by removal of an integral portion of the material acted upon, but not such as depends upon the application of a coating capable of taking a polish by friction or upon a compression, consolidation, or swaging of the material. Every invention relating to abrading must have to do either with an abrading element; a tool consisting of an abrading element or material and a holder by which it may be put to use; a machine embodying an abrading material or tool and means for moving it or the work, or an action equivalent to that of a tool; a holder for the work; a method or process of abrading; an attachment or accessory to a tool, machine, or process; or a plurality of these features. Note: A cutting device and an abrasive tool distinguished solely by the abrasive material or composition will be found elsewhere.

Subclass 10: And feeding of tool or work holder
Subclass 104: Immersion
Subclass 106: Rotary work holder
Subclass 113: Immersion
Subclass 14: Screw actuated
Subclass 164: Rectilinear
Subclass 167: Endless work carrier
Subclass 168: Flexible strip or endless band tool
Subclass 173: Rotary work holder
Subclass 182: One-way work traverse
Subclass 19: Hydraulically driven
Subclass 194: Opposed abrading tools
Subclass 21: Tool wear compensation
Subclass 210: Rotary work holder
Subclass 24: Hydraulically driven
Subclass 247: Turret
Subclass 256: Lens abrader
Subclass 258: Disk or wheel abrader
Subclass 259: Rotary disk
Subclass 285: Rotary work holder
Subclass 286: By means loosely confining work
Subclass 287: Planar surface abrading
Subclass 288: Having pressure plate
Subclass 289: Having vacuum or adhesive securing means
Subclass 290: Disk or wheel abrader
Subclass 291: Planetary
Subclass 296: Endless band tool
Subclass 297: Belt tracking
Subclass 298: Chain
Subclass 299: One-way work traverse
Subclass 300: Endless work carrier
Subclass 302: Opposed endless band abrading tools
Subclass 303: Presser or former
Subclass 304: Reciprocating band carrier
Subclass 305: Reciprocating work holder
Subclass 306: Work rotating
Subclass 307: Rotary work holder
Subclass 309: Superposed endless band tools
Subclass 311: Tension device
Subclass 332: Rotary
Subclass 333: With hopper or magazine
Subclass 340: FRAME OR MOUNT
Subclass 364: WORK HOLDER
Subclass 378: Portable
Subclass 385: Work rotating
Subclass 387: Angularly adjustable
Subclass 388: Vacuum
Subclass 397: Work rotating
Subclass 398: Rotary work holder
Subclass 400: Orbital movement
Subclass 401: Turret
Subclass 402: Rotary
Subclass 41: Glass or stone abrading
Subclass 442: ACCESSORY
Subclass 443: Dressing
Subclass 444: Tool cleaner
Subclass 446: Abradant supplying
Subclass 489: FLEXIBLE-MEMBER TOOL MOUNTED ON PLURAL ROLLS
Subclass 490: TOOL SUPPORT FOR FLEXIBLE-MEMBER TOOL
Subclass 493: On spool or axle
Subclass 495: Contour-adjustable support
Subclass 499: With tool tensioning means
Subclass 51: Ring, tube, bushing, sleeve, or cylinder abrading
Subclass 523: Manually manipulated
Subclass 526: FLEXIBLE-MEMBER TOOL, PER SE
Subclass 527: Interrupted or composite work face (e.g., cracked, nonplanar, etc.)
Subclass 528: Uniform thickness nonplanar
Subclass 529: Sectional
Subclass 53: With critical temperature modification or control of work or abradant
Subclass 530: Work face variegated or on projecting backing
Subclass 531: Splice or joint
Subclass 533: Laminate
Subclass 534: Discontinuous or differential coating impregnation or bond
Subclass 536: Integrated strands
Subclass 537: Non-coextensive laminae
Subclass 538: Strippable layer or component
Subclass 539: Abrasive on one surface only
Subclass 54: With critical nonabrading work treating
Subclass 56: With tool treating or forming
Subclass 57: Combined abrading
Subclass 59: Utilizing nonrigid tool
Subclass 60: Abradant supplying
Subclass 63: Side face of disk
Subclass 65: Combined
Subclass 66: Scouring or polishing means
Subclass 72: Having means to refurbish abrading tool

Class 294: Handling: Hand And Hoist-Line Implements

Devices combined with handles, terminal elements, or attachments peculiarly adapted for engaging supporting articles or materials for handling or manipulating purposes.

Subclass 64.1: VACUUM

Class 269: Work Holders

A device which, during a work treating operation, contacts a workpiece for the purpose of (a) supporting the work against the force of gravity; or (b) preventing movement of the work in a particular direction or in all directions while, as disclosed, such work is supported against the force of gravity; or (c) providing a surface juxtaposed to the work for constraining the motion of a tool during its performance of such work treating operation. Holding articles together so that (by disclosure) a glue, cement or adhesive may set and secure said articles together is considered to be a work holding operation for this class. Thus a clamp or vise, disclosed for use by cabinet makers, carpenters, woodworkers, etc., to hold plural pieces together while an adhesive sets, is properly classifiable in this class.

Subclass 21: Vacuum-type holding means

Class 414: Material Or Article Handling

Apparatus, device, implement or method for placing or displacing particular articles in a particular manner or with reference to a particular support, for loading or unloading vehicles with materials or objects in general, charging or discharging furnaces, bins, chambers, or other receptacles, stacking or piling articles or materials, also combinations of general types of carriers or forwarding mechanisms, which types, per se, are separately classified elsewhere, and general types of elevators, cranes, or hoists when associated with special means for handling the load to place it on the carrier or remove it therefrom.


Class 901: Robots

This collection provides for a reprogrammable, multifunction manipulator designed to move devices through variable programmed motions for the performance of changeable tasks on a repetitive basis without human intervention and all subcombinations thereof specialized for use with such manipulator.

Subclass 40: Vacuum or mangetic

Class 356: Optics: Measuring And Testing

Methods and apparatus (1) for analyzing light to measure or test its characteristics, such as intensity, color and polarization; (2) for determining the optical or nonoptical properties of materials or articles by noting, as by inspection, measurement, or test the effect produced by the materials or articles on light associated therewith; and (3) for measuring the dimensions of structures or the spatial relationships such as distances or angle bearings of spaced points by comparison of the respective properties (usually direction or spatial position) of the light from these points or by comparison of the properties of these lights with some scale or standard. The light analyzing includes or is for spectroscopy, interference, polarization, beam direction or pattern, focal position of a light source, shade or color, and photometers. The material or article properties determined are or involve crystal or gem examination, material strain analysis, blood analysis, optical pyrometers, egg candling, cutting blade sharpness, oil testing, document verification, flatness, lens or reflector testing, refraction testing, monitoring moving webs or fabrics, light transmission or absorption, light reflection, inspection for flaws or imperfections in materials, and thread counting. The dimensioning and spatial relationship determination includes triangulation by a light beam, contour plotting, range or height finders, motion stopping, velocity or velocity/height measuring, sighting where the optical element or reticle moves with the sighted object, particle size determination, particle light scattering, electrophoresis, angle measuring or axial alignment, mensuration or configuration comparison, alignment in a lateral direction, and fiducial instruments.

Subclass 369: Of surface reflection
Subclass 600: SURFACE ROUGHNESS
Subclass 630: Thickness
Subclass 632: Of light permeable material

Class 257: Active Solid-State Devices (E.G., Transistors, Solid-State Diodes)

This class provides for active solid-state electronic devices, that is, electronic devices or components that are made up primarily of solid materials, usually semiconductors, which operate by the movement of charge carriers - electrons or holes - which undergo energy level changes within the material and can modify an input voltage to achieve rectification, amplification, or switching action, and are not classified elsewhere.

Subclass E21.23: With simultaneous mechanical treatment, e.g., chemical-mechanical polishing (EPO)
Subclass E21.243: Planarization of insulating layer (EPO)
Subclass E21.244: Involving dielectric removal step (EPO)
Subclass E21.304: By chemical mechanical polishing (CMP) (EPO)
Subclass E21.528: Acting in response to ongoing measurement without interruption of processing, e.g., endpoint detection, in-situ thickness measurement (EPO)
Subclass E21.579: For dual damascene type structures (EPO)
Subclass E21.583: Planarization; smoothing (EPO)

Class 438: Semiconductor Device Manufacturing: Process

This class provides for manufacturing a semiconductor containing a solid-state device for the following purposes: (a) conducting or modifying an electrical current, (b) storing electrical energy for subsequent discharge within a microelectronic integrated circuit, or (c) converting electromagnetic wave energy to electrical energy or electrical energy to electromagnetic energy. Also operations involving: (1) coating a substrate with a semiconductive material, or (2) coating a semiconductive substrate or substrate containing a semiconductive region. It also provides for operations involving etching a semiconductive substrate or etching a substrate containing a semiconductive region. The class provides for packaging or treatment of packaged semiconductor.

Subclass 16: Optical characteristic sensed
Subclass 633: Simultaneously by chemical and mechanical means
Subclass 687: Copper of copper alloy conductor
Subclass 690: Combined with the removal of material by nonchemical means (e.g., ablating, abrading, etc.)
Subclass 691: Combined mechanical and chemical material removal
Subclass 692: Simultaneous (e.g., chemical-mechanical polishing, etc.)
Subclass 693: Utilizing particulate abradant
Subclass 694: Combined with coating step
Subclass 697: Planarization by etching and coating
Subclass 700: Formation of groove or trench
Subclass 745: Liquid phase etching
Subclass 8: Chemical etching
Subclass 959: MECHANICAL POLISHING OF WAFER

Class 156: Adhesive Bonding And Miscellaneous Chemical Manufacture

This is the generic class for: Manufacturing processes and apparatus; manufacture of articles of commerce in which one of the manufacturing steps includes a chemical reaction; manufacture of panels from settable inorganic compositions; manufacture of electrical conductors of indefinite length.

Subclass 137: Flexible endless drive belt making
Subclass 345.1: DIFFERENTIAL FLUID ETCHING APPARATUS
Subclass 345.11: For liquid etchant
Subclass 345.12: With mechanical polishing (i.e., CMP-chemical mechanical polishing)
Subclass 345.13: With measuring, sensing, detection or process control means
Subclass 345.14: With wafer retaining ring
Subclass 345.16: With endpoint detection means
Subclass 345.18: With means to supply, remove, or recycle liquid etchant outside of etching tank or chamber (e.g., supply tanks or pipe network)
Subclass 345.2: Running length workpiece (e.g., etching indeterminate length strip)
Subclass 345.27: For temperature detection or control

Class 700: Data Processing: Generic Control Systems Or Specific Applications

This class is structured into two main divisions: (1)for the combination of a data processing or calculating computer apparatus (or corresponding methods for performing data processing or calculating operations) AND a device or apparatus controlled thereby, the entirety hereinafter referred to as a "control system". (2)for data processing or calculating computer apparatus (or corresponding methods for performing data processing or calculating operations) wherein the data processing or calculating computer apparatus is designed for or utilized in a particular art device, system, process, or environment, or is utilized for the solution of a particular problem in a field other than mathematics (arithmetic processing per se is classified elsewhere).

Subclass 121: Integrated circuit production or semiconductor fabrication
Subclass 164: Grinding

Class 216: Etching A Substrate: Processes

Chemical etching processes for treating articles of commerce or intermediate articles not otherwise provided for in which one of the manufacturing steps includes a chemical etching step (use of an etchant) and wherein the material treated is not completely removed.

Subclass 88: Using film of etchant between a stationary surface and a moving surface (e.g., chemical lapping, etc.)

Class 51: Abrasive Tool Making Process, Material, Or Composition

Making an abrading tool, expressed as a process, material, or composition; which tool is comprised of randomly situated sharp edges of a mass of natural or manmade (synthetic) mineral crystals; or a material or composition designed for an abrading purpose if not provided for elsewhere.

Subclass 297: LAMINATING

Class 198: Conveyors: Power-Driven

A power-driven conveyor is an assemblage of elements for moving a load over a predetermined path or path section. The assemblage generally includes a single frame structure mounting a power-driven load-advancing means which is used to advance the load over the predetermined path.

Subclass 846: Formed of or including a continuous member of sheet-like material (e.g., canvas, etc.)
Subclass 847: Including separate reinforcing elements or plural sheet-formed plies

Class 15: Brushing, Scrubbing, And General Cleaning

Apparatus designed or adapted for cleaning - for the removal of foreign matter - by any of the following means - viz., a draft or current of air, steam, or equivalent gaseous fluid, dry brushing along; brushing, and an applied liquid - i.e., scrubbing, beating, scraping, erasing, shaking, wiping, shotting, the use of squeegee, the application of an electrostatic field or any combination including one or more of these agencies.

Subclass 77: Sheet, bar, and plate cleaners
Subclass 88.2: Work moves past rotatable brush
Subclass 88.3: Cylindrical brush
Subclass 88.4: Cylindrical brush moves past work
Subclass 102: Sheet, bar, and plate cleaners

Class 341: Coded Data Generation Or Conversion

1) originating or emitting a coded set of discrete signals or 2) translating one code into another code wherein the information signal content remains the same but the formats may differ. For classification herein, at least one of the codes must be a set of pulses or digits and electrical in nature.

Subclass 108: REVERSIBLE ANALOG TO DIGITAL CONVERTERS
Subclass 126: ANALOG TO OR FROM DIGITAL CONVERSION
Subclass 131: Increasing converter resolution (e.g., dithering)
Subclass 155: Analog to digital conversion

Class 324: Electricity: Measuring And Testing

This is the residual home for all subject matter, not elsewhere classified, relating to the measuring, testing (or sensing) of electric properties, (e.g., determining ground resistivity, determining frequency of an alternating current, determining kilowatt hour demand), or the measuring, testing or sensing of nonelectric properties by electric means (e.g., determining moisture, a nonelectric property, by measuring conductance with a resistance bridge; determining speed, a nonelectric property by use of an electric tachometer).

Subclass 71.5: Semiconductors for nonelectrical property

Class 264: Plastic And Nonmetallic Article Shaping Or Treating: Processes

Processes for molding, casting, or shaping of nonmetallic materials to produce articles. Liquid or melt comminuting of materials other than glass or metal. Uniting or compacting of bulk or randomly assembled particles. Furnace Lining or repair. Melt shaping in the absence of a mold or shaping surface, e.g., spheroidizing of particles. Working or treatment of nonmetallic materials not otherwise provided for.

Subclass 219: WITH STEP OF MAKING MOLD OR MOLD SHAPING, PER SE
Subclass 259: Shaping material and uniting to a preform
Subclass 275: Positioning or maintaining position of preform relative to mold surface
Subclass 278: By removable means

Class 702: Data Processing:Measuring, Calibrating, Or Testing

This class provides for apparatus and corresponding methods wherein the data processing system or calculating computer is designed for or utilized in an environment relating to a specific or generic measurement system, a calibration or correction system, or a testing system.

Subclass 41: Force or torque measurement

Class 701: Data Processing:Vehicles, Navigation, And Relative Location

This class provides for electrical computers, digital data processing systems, and data processing processes for transferring data between computers or processes wherein the computers or processes employ the data before or after transferring and the employing affects the transfer of data therebetween. This class is for electricalapparatus and corresponding methods for performing data processing operations in which there is a significant change in the data or for performing calculation operations wherein the electrical data processing system or calculating computer functions to indicate a condition of a vehicle, to regulate the movement of a vehicle, to monitor the operation of a vehicle, or to solve a diagnostic problem with the vehicle. It also provides electrical apparatus and corresponding methods wherein the electrical data processing system or calculating computer function to determine the course, position, or distance traveled. It further provides electrical apparatus and corresponding methods wherein the electrical data processing system or calculating computer functions to determine the relative location of an object (e.g., person or vehicle) and may include communication of the determined relative location to a remote location. In this class there are three main divisions: 1. vehicle control, guidance, operation or indication; 2. navigation; 3. relative location

Subclass 44: Artificial intelligence (e.g., fuzzy logic)

Class 134: Cleaning And Liquid Contact With Solids

Cleaning, i.e., the separation or removal of adherent dirt, scale, tarnish, impurities or any other foreign or undesired matter from solid materials or objects whether or not the resultant separated ingredients are recovered in whole or in part for subsequent use. Cleaning may be performed by, or may involve as a part thereof, contacting solids with liquids. The contacting of solids with liquids may be for purposes other than cleaning.

Subclass 1.3: Semiconductor cleaning
Subclass 6: Using solid work treating agents
Subclass 25.4: Manufactured articles
Subclass 42: Miscellaneous
Subclass 56R: Automatic controls
Subclass 57R: With electric control
Subclass 58R: Electrically controlled
Subclass 184: With movable means to cause fluid motion (e.g., pump, splasher, agitator)

Class 310: Electrical Generator Or Motor Structure

This is the residual class for all subject matter, not elsewhere classified, relating to electrical generator or motor structure.

Subclass 323.19: Horn or transmission line
Subclass 335: With lens or reflector

Class 222: Dispensing

Processes and apparatus for dispensing material, and takes all such subject matter that must be classified on such basis. This class is not limited as to the character of the materials dispensed which may be in any physical state, i.e., it may be in a gas, vapor, liquid, viscous, paste-like or solid state and if in a self sustaining state may have any form or shape.

Subclass 1: PROCESSES OF DISPENSING
Subclass 3: GAS OR VAPOR DISPENSING

Class 191: Electricity: Transmission To Vehicles

Means for transmitting electrical energy between relatively moving objects. Generally involves the problem of transmitting electrical energy from fixed points to vehicles or other moving objects, or vice versa.

Subclass 12R: FLEXIBLE EXTENSIONS

Class 248: Supports

Devices which carry the weight of an article or articles or otherwise hold or steady it or them against the pull of gravity, and devices for holding an article to its support, which are not otherwise provided for.

Subclass 49: PIPE OR CABLE
Subclass 53: Train coupling type
Subclass 56: Extending through plate

Class 52: Static Structures (E.G., Buildings)

The residual class for static structures. It includes on site erected structures generally identified by terms such as: civil engineering, public works, shelter, housing, buildings or masts and other related components used in such structures, e.g., panels, beams, columns. etc. Also, included are selected structurally similar components, such as, table top panels, poles, posts, window sash elements or door panels even though not disclosed as specialized as components of a building structure. Also, are included processes, machines and implements used in the construction of such structures which are not elsewhere provided for.

Subclass 126.6: Adjustable pedestal

Class 118: Coating Apparatus

pparatus for applying or obtaining a surface coating on a base and/or apparatus for impregnating base materials and takes all such apparatus not provided for in other classes. The coating obtained may be permanent or transitory. The coating may be supplied solely by extraneous materials, as in a painting or waxing operation, or may be supplied wholly or in part by the base materials as in the formation of an oxide coating on a metal base. The coating may consist of an emulsion, dispersion, solution, admixture or oil which is clearly disclosed as leaving a residual film, layer or continuous deposit on the base.

Subclass 719: Multizone chamber

Class 141: Fluent Material Handling, With Receiver Or Receiver Coacting Means

Transfer of fluent material, gaseous, liquid or flowable granular solids, through a flow confining system, the source and terminal or receiver parts of which are normally separable. Each part therefore must comprise an entity capable of use independent of the other, and together the parts provide a flow path from a source or dispenser to a terminal part or receiver, thereby comprising a filling system. This class takes a mere dispenser-receiver combination where separability is claimed or is inherent, and also takes means to deliver material to a receiver when there is claimed some system characteristic which peculiarly relates the receiver to the dispenser to define a coaction of one with the other to complete the dispenser-receiver relationship. Includes processes of varying gaseous conditions in a vessel or container. The scope of this class does not include method and apparatus for handling fluent material except in a manner characteristic of fluid flow.

Subclass 83: WITH TESTING OR WEIGHING RECEIVER CONTENT