Tynax ~ Patent Library

Patent Portfolio for Sale:

Laser Pattern Generation and Control    

Patent portfolio for generating and controlling laser patterns.


A laser pattern generation apparatus particularly suited for semiconductor applications. The laser beam is split into a plurality of beams and modulated with acousto-optic modulators. A rotating mirror having a plurality of facets causes the beam to scan the workpiece. The pattern generation apparatus can be used to expose a radiant sensitive film on the workpiece to print circuit patterns on a substrate. The laser beam is aligned using a beam steering means. The laser beam is split into a brush of small beams that scan the workpiece through use of a rotating polygonal mirror. The beams are modulated by an Acousto-Optical Modulator with input from a rasterizer. The increased print speed is accomplished through the use of a wider brush and a print strategy that eliminates physical stage passes.

Primary Application of the Technology

Laser beam inspection and writing in semiconductor processing.

Other Potential Applications

Laser Patterning of other materials in other domains.

The seller would like to be granted a license back.

Additional Information

Several patent applications are also available as part of this portfolio.

Patent Summary

U.S. Patent Classes & Classifications Covered in this listing:

Class 356: Optics: Measuring And Testing

Methods and apparatus (1) for analyzing light to measure or test its characteristics, such as intensity, color and polarization; (2) for determining the optical or nonoptical properties of materials or articles by noting, as by inspection, measurement, or test the effect produced by the materials or articles on light associated therewith; and (3) for measuring the dimensions of structures or the spatial relationships such as distances or angle bearings of spaced points by comparison of the respective properties (usually direction or spatial position) of the light from these points or by comparison of the properties of these lights with some scale or standard. The light analyzing includes or is for spectroscopy, interference, polarization, beam direction or pattern, focal position of a light source, shade or color, and photometers. The material or article properties determined are or involve crystal or gem examination, material strain analysis, blood analysis, optical pyrometers, egg candling, cutting blade sharpness, oil testing, document verification, flatness, lens or reflector testing, refraction testing, monitoring moving webs or fabrics, light transmission or absorption, light reflection, inspection for flaws or imperfections in materials, and thread counting. The dimensioning and spatial relationship determination includes triangulation by a light beam, contour plotting, range or height finders, motion stopping, velocity or velocity/height measuring, sighting where the optical element or reticle moves with the sighted object, particle size determination, particle light scattering, electrophoresis, angle measuring or axial alignment, mensuration or configuration comparison, alignment in a lateral direction, and fiducial instruments.

Subclass 508: For orientation or alignment

Class 355: Photocopying

Apparatus and methods for photos: graphically copying information from an original or carrier that is not classified elsewhere, generally employing a concentrated source of light and an image receiving medium with a photosensitive emulsion surface. Various plural and composite types of copies are included such as those involving plural projected images including multicolor and duplex.

Subclass 51: Reflector between original and photo-sensitive paper
Subclass 53: Step and repeat
Subclass 77: Methods

Class 359: Optical: Systems And Elements

Optical elements included in this class are: Lenses; Polarizers; Diffraction gratings; Prisms; Reflectors; Filters; Projection screens; Optical Modulators; Optical Demodulators. Among the optical systems included in this class are: Compound lens systems; Light reflecting signalling systems (e.g., retroreflectors); stereoscopic systems; Binocular devices; Systems of lenticular elements; Systems involving light interference; Glare reducing systems; Light dividing and combining systems; Light control systems (e.g., light valves); building illumination with natural light; Systems for protecting or shielding elements; Optical systems whose operation depends upon polarizing, diffracting, dispersing, reflecting, or refracting light; kaleidoscopes. Further included are certain apertures, closures, and viewing devices of a specialized nature which involve no intentional reflection, refraction, or filtering of light rays. This class also includes optical elements combined with another type of structure(s) to constitute an optical element combined with a nonoptical structure or a perfection or improvement in the optical element.

Subclass 285: Acousto-optic
Subclass 290: By changing physical characteristics (e.g., shape, size or contours) of an optical element
Subclass 305: Acousto-optic
Subclass 364: With curved reflective imaging element
Subclass 366: Concave, convex combination
Subclass 558: DIFFRACTION
Subclass 572: Reflection grating (e.g., retrodirective)
Subclass 629: By partial reflection at beam splitting or combining surface
Subclass 635: Drawing or plotting aid
Subclass 636: Including full reflection and transmission of a beam at different portions of a beam divider
Subclass 640: Including prismatic element
Subclass 649: Projection type
Subclass 650: Having four components
Subclass 651: Having less than four components
Subclass 669: With prism anamorphoser
Subclass 683: With mechanical compensation
Subclass 710: Cylindrical
Subclass 727: Including concave or convex reflecting surface
Subclass 731: With concave and convex reflectors in series
Subclass 771: Four components
Subclass 837: With refracting surface
Subclass 839: With a transmitting property
Subclass 850: Plural mirrors or reflecting surfaces

Class 396: Photography

Photographic apparatus, generally for recording a picture made by a source of light on a photographic medium. It includes fluid-treating apparatus for development of film, a removable film-holder unit, hood, camera housing, camera setting indicator and certain accessories related to photography not otherwise provided for such as studio structure, camera mounting or rest, camera attachment, retouching, or burnishing device. Non-chemical processes involving photographic apparatus are included in this class.

Subclass 430: Convertible to developed image projector or viewer

Class 347: Incremental Printing Of Symbolic Information

Processes and apparatus for conveying information by selectively creating on a medium a visibly distinguishable symbol or mark composed of a plurality of portions; created portion by portion as, for example, by pixels or dots. The symbol or mark may be an alphanumeric character or an image.

Subclass 233: Plural beam scan
Subclass 239: Specific light modulator
Subclass 241: Specific optical structure
Subclass 243: Including deflector
Subclass 244: Specific lens
Subclass 251: Tone marking
Subclass 253: By varying intensity of light beam
Subclass 254: By varying dotting density
Subclass 255: Specific light modulator
Subclass 256: Specific optical structure
Subclass 258: Having lens
Subclass 259: Including deflector
Subclass 260: Having deflector
Subclass 261: Polygon

Class 345: Computer Graphics Processing And Selective Visual Display Systems

Processes and apparatus for selective electrical control of two or more light-generating or light-controlling display elements* in accordance with a received or stored image data signal. The image data includes character, graphical information or display attribute data. The image data may include, for example, information data from a peripheral input device, from the reception of a television signal, from the recognition of image data, or from the generation or creation of image data by a computer.

Subclass 206: Having common base or substrate
Subclass 440: Graph generating
Subclass 441: Shape generating
Subclass 502: Plural graphics processors
Subclass 536: Plural storage devices
Subclass 567: Using decoding
Subclass 571: Memory addresses arranged in matrix row and column addresses)
Subclass 690: Intensity or color driving control (e.g., gray scale)

Class 358: Facsimile And Static Presentation Processing

Communication or reproduction of a static image or sequence of static images in which the local light, or density variations composing the image do not vary with time by a method or apparatus involving at least one of the following steps: (1) scanning a static image to capture an image-containing area by resolving it into an area; (2) communication of an image-representative signal or image-representative data over any supporting communication network; or (3) reproduction of an image-containing area in response to an image-representative signal or image-representative image data by reproducing a corresponding image area which at least one of the two dimensions is elemental, simultaneously or in a sequence. In this class, a facsimile system or method is a system or method for the communication or reproduction of an arbitrarily composed image in which the local light, or density variations composing the image do not vary with time, such as documents maps, charts, photographs, etc., but not motion picture film or video.

Subclass 1.8: Dot matrix array (e.g., printheads, etc.)
Subclass 1.9: Attribute control
Subclass 296: Recording apparatus
Subclass 3.01: Multi-level image reproduction (e.g., gray level reproduction)
Subclass 3.06: Halftoning (e.g., a pattern of print elements used to represent a gray level)
Subclass 3.24: Adaptive image reproduction

Class 250: Radiant Energy

This class provides for all methods and apparatus for using, generating, controlling or detecting radiant energy, combinations including such methods or apparatus, subcombinations of same and accessories therefore not classifiable elsewhere.

Subclass 234: Means for moving optical system

Class 73: Measuring And Testing

Processes and apparatus for making a measurement of any kind or for making a test of any kind, and takes all such subject matter not provided for in other classes. The term "test" includes inspection, processes and apparatus for determining qualities by inspection being included where not provided for in other classes. This class is the generic class for sampling and takes all sampling apparatus and processes not otherwise provided.

Subclass 37.5: Dimension, shape, or size

Class 257: Active Solid-State Devices (E.G., Transistors, Solid-State Diodes)

This class provides for active solid-state electronic devices, that is, electronic devices or components that are made up primarily of solid materials, usually semiconductors, which operate by the movement of charge carriers - electrons or holes - which undergo energy level changes within the material and can modify an input voltage to achieve rectification, amplification, or switching action, and are not classified elsewhere.

Subclass E21.028: Using laser (EPO)

Class 430: Radiation Imagery Chemistry: Process, Composition, Or Product Thereof

This is the generic class for: (1) Forming the likeness of an object, or an instrumented or discernible phenomenon, in a chemically defined receiver or in a receiver wherein radiation produces a chemical reaction, by use of radiation. (2) Finishing an image by chemical processing regardless how formed. (3) A radiation sensitive receiver, composition, or product disclosed solely for radiation imagery chemistry, and process of making same. (4) A nonradiation sensitive-receiver, composition, or product. (5) An imaged product by a process or employing a receiver, composition, or product.

Subclass 5: Radiation mask
Subclass 296: Electron beam imaging