Patent Portfolio for Sale:

System for Non-Contact Electrical Testing    

Patent portfolio covers testing of interconnection circuitry using two modulated charged particle beams

Overview

Apparatus and a method for non-contact electrical testing of printed circuit boards, solid state display devices, integrated circuits and other substrates with traces that connect together components of a circuit, using two modulated charged particle beams. The apparatus includes two sources of beams, electrodes to modulate the beams, optics to focus the beams and deflection coils to deflect the beams over a large area. The apparatus also has an enclosure around the optics and the deflection coils of magnetically soft material. A surrounding solenoid excitation coil creates an almost uniform axial magnetic field within the magnetic enclosure. A detection system for detecting the voltage contrast signals, including suitable signal processing system is also provided. The use of two beams simultaneously allows fast, direct measurement of impedance parameters. By selecting appropriate beam modulation frequencies, the sensitivity to a certain kind of defect can be selectively increased.

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Patent Summary

U.S. Patent Classes & Classifications Covered in this listing:

Class 250: Radiant Energy

This class provides for all methods and apparatus for using, generating, controlling or detecting radiant energy, combinations including such methods or apparatus, subcombinations of same and accessories therefore not classifiable elsewhere.

Subclass 305: ELECTRON ENERGY ANALYSIS
Subclass 306: INSPECTION OF SOLIDS OR LIQUIDS BY CHARGED PARTICLES
Subclass 311: Electron microscope type
Subclass 492.1: IRRADIATION OF OBJECTS OR MATERIAL
Subclass 492.2: Irradiation of semiconductor devices
Subclass 492.22: Pattern control

Class 850: Scanning-probe techniques or apparatus; applications of scanning-probe techniques, e.g., scanning probe microscopy [spm]

This class covers Scanning probes, i.e., devices having at least a tip of nanometre sized dimensions that scans or moves over an object surface, typically at a distance of a few angstroms or nanometres, monitoring some interaction between the tip and the surface, e.g., monitoring the generation of a tunnelling current and techniques or apparatus involving the use of scanning probes. The following subjects are therefore covered, the list being non-exhaustive: scanning probes, per se, their manufacture or their related instrumentation, e.g., holders; scanning probe microscopy (SPM) or microscopes, i.e., the application of scanning probes to the investigation or analysis of a surface structure in atomic ranges; applications, other than SPM, involving the use of scanning probes.

Subclass 16: Vacuum environment (EPO)
Subclass 4: Circuits or algorithms therefor(EPO)
Subclass 9: Non-SPM analyzing devices, e.g., Scanning Electron Microscope [SEM], spectrometer or optical microscope (EPO)