LIST YOUR TECHNOLOGY  |  LOOK FOR TECHNOLOGY  |  RSS FEEDS  |  ABOUT  |  CONTACT 

 Listing Status

Listing Number: 1043

Active
Currently available

 Category

Technology Type

Related Topics

Monitors & Displays

Lighting

Coherent

Dioptrics

High Energy & Particle

 Deal Structure

Structure Sought

Sale of patent
Exclusive license with right to enforce
Exclusive license
Non-exclusive license
Region/country license
Field-of-use license

 Intellectual Property

8 Issued Patents - US
  Tell Me More       Bookmark      

Patent Portfolio for Sale

Precise Alignment of Micro-column Electron Beams

Patent portfolio for precise alignment of electron beam emitter with an extractor hole of micro-column


Overview

 

A method and an accompanied apparatus for aligning an electron emitter with an extractor hole of a microcolumn. A field emission source produces a charged particle beam that can be electrostatically aligned with the optical axis.

The shaped electron beam column focuses the electrons from the electron source to produce a shadow image of a shaped aperture on a writing plane.

The system allows for precise alignment of microcolumn tip to a micron-size extractor aperture and  suppresses the emission noise to enable for robust and stable microcolumn applications.

Primary Application of the Technology

Electron beam inspection and lithography

The seller would like to be granted a license back.

Patent Summary

U.S. Patent Classes & Classifications Covered in this Patent Portfolio:

Class 250: Radiant Energy

This class provides for all methods and apparatus for using, generating, controlling or detecting radiant energy, combinations including such methods or apparatus, subcombinations of same and accessories therefore not classifiable elsewhere.

Subclass 250: RADIO AND MICROWAVE ABSORPTION WAVEMETERS
Subclass 310: Electron probe type
Subclass 311: Electron microscope type
Subclass 396R: WITH CHARGED PARTICLE BEAM DEFLECTION OR FOCUSSING
Subclass 397: With detector
Subclass 492.2: Irradiation of semiconductor devices
Subclass 492.21: Ion bombardment
Subclass 492.22: Pattern control
Subclass 492.23: Variable beam

Class 445: Electric Lamp Or Space Discharge Component Or Device Manufacturing

This is the residual and generic class of process and apparatus for the manufacturing, fabrication, repair, salvage, assembly, disassembly or other treatment of an electric lamp, liquid crystal display device or an electric space discharge device which process or apparatus is not elsewhere classified.

Subclass 33: Plural electrode mounting
Subclass 35: Electrode making
Subclass 46: Electrode making
Subclass 50: Emissive type

Class 359: Optical: Systems And Elements

Optical elements included in this class are: Lenses; Polarizers; Diffraction gratings; Prisms; Reflectors; Filters; Projection screens; Optical Modulators; Optical Demodulators.  Among the optical systems included in this class are: Compound lens systems; Light reflecting signalling systems (e.g., retroreflectors); stereoscopic systems; Binocular devices; Systems of lenticular elements; Systems involving light interference; Glare reducing systems; Light dividing and combining systems; Light control systems (e.g., light valves); building illumination with natural light; Systems for protecting or shielding elements; Optical systems whose operation depends upon polarizing, diffracting, dispersing, reflecting, or refracting light; kaleidoscopes. Further included are certain apertures, closures, and viewing devices of a specialized nature which involve no intentional reflection, refraction, or filtering of light rays. This class also includes optical elements combined with another type of structure(s) to constitute an optical element combined with a nonoptical structure or a perfection or improvement in the optical element.

Subclass 819: Lens mounts

Class 313: Electric Lamp And Discharge Devices

This is the generic class for electric lamp and electric space discharge device structure. Examples of such devices are electric incandescent lamps, gas or vapor filled electric discharge tubes, including lamps, mercury arc devices, vacuum discharge tubes, radio tubes, cyclotrons, cathode-ray tubes, photosensitive discharge devices, secondary emission electron multipliers, spark plugs, and open air arc and spark devices.

Subclass 251: Plural electrodes supported along the length of a wire, rod, or tube
Subclass 293: DISCHARGING DEVICES WITH APERTURED ELECTRODE (E.G., GRID) INTERPOSED BETWEEN TWO ELECTRODES
Subclass 447: With control grid adjacent cathode

 

Tell Me More

 
Home | About Us | Log in | Feedback | Help