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Technologies Available: Cybernetics
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Apparatus for electro-chemical deposition with thermal anneal chamber  
An electro-chemical deposition system that is designed with a flexible architecture that is expandable to accommodate future designs rules and gap fill requirements ......  more

Pixel Based Machine for Patterned Wafers  
A method is provided for the detection of defects on a semiconductor wafer by checking individual pixels on the wafer......  more

Feature-based defect detection  
Detection of defects in patterned substrates, such as semiconductor wafers, particularly based on features in voltage-contrast images. ...  more

Method and apparatus for priority based scheduling of wafer processing within a multiple chamber processing tool  
a multiple chamber wafer processing system - method and apparatus for scheduling processing for a semiconductor wafer within a multiple chamber semiconductor wafer processing tool....  more

Thermal CVD/PECVD reactor  
A high pressure, high throughput, single wafer, semiconductor processing reactor ...  more

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