Technologies Available: Instrumentation

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Wireless Safety, Security and Health Monitoring / Reporting
Unlike traditional telemetry based biophysical monitoring systems, this technology can be programmed with a broad range of monitoring parameters. ... more

Multi-Function Dental Cleaning Device
Offers the optimum method of cleaning teeth from different angles.... more

Direct and Accurate Measurement of Gas Permeability of Containers
Direct and accurate measurement of gas permeation rates of various barriers.... more

Communication and Control Systems
... more

Low-cost, Compact, Miniature Electron Beam Column for Scanning Electron Microscopy and e-beam Lithography
Compact, low-cost and highly precise electron beam micro-column for low-voltage electron beam applications... more

Enhanced edge resolution and critical dimension linearity in lithography
A semiconductor fabrication gray level photolithography strategy, in which the energy beam intensities corresponding to each gray level are selected from a set of non-linear, non-monotonic intensities... more

System for Process Variation Monitor
A method to extend the process monitoring capabilities of a semiconductor wafer optical inspection system...... more

Tuning Method for a Processing Machine
A method for setting at least one selected parameter of a processing tool. The processing tool is utilized for processing articles in a production line. ... more

Calibration Tool
A method and apparatus for determining a position of an object.... more

Integrated low K dielectrics and etch stops
A method of depositing and etching dielectric layers having low dielectric constants and etch rates that vary by at least 3:1 for formation of horizontal interconnects. ... more

Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus
The polishing pad for a chemical mechanical polishing apparatus and a method of making the same. ... more

Raster shaped beam writing strategy system and method for pattern generation
A hybrid exposure strategy for pattern generation uses wide field raster scan deflection and a uniformly moving stage to expose long stripes.... more

Method and apparatus for run-time correction of proximity effects in pattern generation
An electron beam pattern generating system for exposing a pattern on a substrate using a raster scan method. ... more

CVD Processing chamber
A process chamber is disclosed which provides a 360.degree. circular gas/vacuum distribution over a substrate being processed. ... more

Discrete phase shift mask writing
A method and apparatus for photolithographically fabricating features on a very large scale integrated circuit wafer by use of a phase shift mask defining discrete regions. This overcomes the problems... more

Multi-chamber integrated process system
A multiple chamber silicon wafer VLSI processing system that includes a common load lock and wafer exchange robot and multiple process chambers... more

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