Techology Listings: Instrumentation

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CSP Package Processing Technology ... more

Core Technology/Key Processing of BGA Package ... more

Nanometer Sensor for Environmental Monitoring Nanometer Sensor for Environmental Monitoring ... more

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Wireless Safety, Security and Health Monitoring / Reporting

Unlike traditional telemetry based biophysical monitoring systems, this technology can be programmed with a broad range of monitoring parameters. ...

Direct and Accurate Measurement of Gas Permeability of Containers

Direct and accurate measurement of gas permeation rates of various barriers....

Low-cost, Compact, Miniature Electron Beam Column for Scanning Electron Microscopy and e-beam Lithography

Compact, low-cost and highly precise electron beam micro-column for low-voltage electron beam applications...

System for Process Variation Monitor

A method to extend the process monitoring capabilities of a semiconductor wafer optical inspection system......

Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus

The polishing pad for a chemical mechanical polishing apparatus and a method of making the same. ...

Discrete phase shift mask writing

A method and apparatus for photolithographically fabricating features on a very large scale integrated circuit wafer by use of a phase shift mask defining discrete regions. This overcomes the problems...

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